Jump to content

Specific Process Knowledge/Characterization/Lifetime scanner MDPmap: Difference between revisions

← Older edit
VisualWikitext
Mdyma (talk | contribs)
danchip
584 edits
Mmat (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers, Administrators
1,954 edits
mNo edit summary
 
(18 intermediate revisions by 4 users not shown)
Line 1: Line 1:
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
{{cc-nanolab}}


'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Lifetime_scanner_MDPmap click here]'''
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Lifetime_scanner_MDPmap click here]'''
<br>
<br>
[[image:Lifetimescanner04.jpg|400x400px|right|thumb|Lifetime scanner MPDmap, positioned in cleanroom F-2.]]


== Microwave Detected Photoconductivity (MDP) ==
Topographic visualisation of electrically active defects or materiel properties at almost any production stage, allows for process optimization and performance prediction of devices.


MDP is a contact less, non destructive measurement technology for the electrical characterization
of a large variety of semiconductors. The mapping and visualization of so far not detectable
defects was achieved by improving the sensitivity of a microwave detection system
by several orders of magnitude. Electrical properties such as lifetime, τ, mobility, μ, and diffusion
length, L, can be measured also at very low injection levels with a spatial resolution limited
only by the diffusion length of the charge carriers.


[[image:IMG_3290.jpg|400x400px|right|thumb|Lifetime scanner MPDmap, positioned in cleanroom D-3.]]
'''The user manual, the APV and contact information can be found in LabManager:'''
 
 
'''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''
 
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=169 Lifetime scanner MPDmap info page in LabManager],


[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=338 Lifetime scanner MPDmap info page in LabManager],


== Performance information ==
== Performance information ==


'''Range of lifetimes''': 20 ns to several ms
'''The resistivity range for lifetime measurements''' 0.2 to 100 Ohm.cm, p/n
'''Material''': Silicon, epitaxial layers, partially or fully processed wafers, compound semiconductors and beyond.
'''Measureable properties''': Carrier lifetime (steady state or non equilibrium (µ -PCD) selectable), photoconductivity (steady state) microwave Photoconductance Decay (µ-PCD)


==Equipment performance and process related parameters==
==Equipment performance and process related parameters==
Line 21: Line 35:


!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment  
!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment  
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"| <b>Lifetime scanner MDPmap </b>
|-
|-
!style="background:silver; color:black;" align="center" width="60"|Purpose  
!style="background:silver; color:black;" align="center" width="60"|Purpose  
Line 32: Line 46:
|style="background:LightGrey; color:black"|
|style="background:LightGrey; color:black"|
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*D-3
*Cx1
 
|-
|-
!style="background:silver; color:black;" align="center" width="60"|Performance
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Instrument specifics
|style="background:LightGrey; color:black"|Resolution
|style="background:WhiteSmoke; color:black"|
*
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Instrument specifics
|style="background:LightGrey; color:black"|Detector
|style="background:LightGrey; color:black"|Detector
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Microwave detector
|-
|-
|style="background:LightGrey; color:black"|Laser
|style="background:LightGrey; color:black"|Laser
Line 47: Line 58:
*405 nm
*405 nm
**Power 5 mW to 100 mW
**Power 5 mW to 100 mW
*978 nm
*977 nm
**Power 5 mW to 140 mW
**Power 5 mW to 190 mW
*975 nm
*975 nm
**Power 0.5 W to 4.0 W
**Power 0.5 W to 4.0 W
|-
*977 nm
|style="background:LightGrey; color:black"|Electron source
**Power up to 200 µW
|style="background:WhiteSmoke; color:black"|
*Spot diameter for all laser 0.5 µm
|-
|style="background:LightGrey; color:black"|Operating pressures
|style="background:WhiteSmoke; color:black"|
|-
|style="background:LightGrey; color:black"|Options
|style="background:WhiteSmoke; color:black"|
|-
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
|style="background:LightGrey; color:black"|Batch size
|style="background:LightGrey; color:black"|Size
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*1 100 mm wafer
*Sample sizs between 5 mm x 5 mm up to 16" or 210 mm x 210 mm
*1 150 mm wafer
*Sample thickness 10 µm to 20 mm
*1 200 mm wafer (not full view)
*Smaller samples
|-
|-
| style="background:LightGrey; color:black"|Allowed materials
| style="background:LightGrey; color:black"|Allowed materials
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Lifetime_scanner_MDPmap"