Specific Process Knowledge/Characterization/Lifetime scanner MDPmap: Difference between revisions

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-=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
+{{cc-nanolab}}
 '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Lifetime_scanner_MDPmap click here]'''
+<br>
+<br>
+[[image:Lifetimescanner04.jpg|400x400px|right|thumb|Lifetime scanner MPDmap, positioned in cleanroom F-2.]]
+== Microwave Detected Photoconductivity (MDP) ==
+Topographic visualisation of electrically active defects or materiel properties at almost any production stage, allows for process optimization and performance prediction of devices.
+MDP is a contact less, non destructive measurement technology for the electrical characterization
+of a large variety of semiconductors. The mapping and visualization of so far not detectable
+defects was achieved by improving the sensitivity of a microwave detection system
+by several orders of magnitude. Electrical properties such as lifetime, τ, mobility, μ, and diffusion
+length, L, can be measured also at very low injection levels with a spatial resolution limited
+only by the diffusion length of the charge carriers.
+'''The user manual, the APV and contact information can be found in LabManager:'''
+[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=338 Lifetime scanner MPDmap info page in LabManager],
+== Performance information ==
+'''Range of lifetimes''': 20 ns to several ms
+'''The resistivity range for lifetime measurements''' 0.2 to 100 Ohm.cm, p/n
+'''Material''': Silicon, epitaxial layers, partially or fully processed wafers, compound semiconductors and beyond.
+'''Measureable properties''': Carrier lifetime (steady state or non equilibrium (µ -PCD) selectable), photoconductivity (steady state) microwave Photoconductance Decay (µ-PCD)
+==Equipment performance and process related parameters==
+{| border="2" cellspacing="0" cellpadding="2"
+!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
+|style="background:WhiteSmoke; color:black"| <b>Lifetime scanner MDPmap </b>
+|-
+!style="background:silver; color:black;" align="center" width="60"|Purpose
+|style="background:LightGrey; color:black"|
+|style="background:WhiteSmoke; color:black"|
+*Carrier Lifetime
+*Photoconductivity
+|-
+!style="background:silver; color:black;" align="center" width="60"|Location
+|style="background:LightGrey; color:black"|
+|style="background:WhiteSmoke; color:black"|
+*Cx1
+|-
+!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Instrument specifics
+|style="background:LightGrey; color:black"|Detector
+|style="background:WhiteSmoke; color:black"|
+*Microwave detector
+|-
+|style="background:LightGrey; color:black"|Laser
+|style="background:WhiteSmoke; color:black"|
+*405 nm
+**Power 5 mW to 100 mW
+*977 nm
+**Power 5 mW to 190 mW
+*975 nm
+**Power 0.5 W to 4.0 W
+*977 nm
+**Power up to 200 µW
+*Spot diameter for all laser 0.5 µm
+|-
+!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
+|style="background:LightGrey; color:black"|Size
+|style="background:WhiteSmoke; color:black"|
+*Sample sizs between 5 mm x 5 mm up to 16" or 210 mm x 210 mm
+*Sample thickness 10 µm to 20 mm
+|-
+| style="background:LightGrey; color:black"|Allowed materials
+|style="background:WhiteSmoke; color:black"|
+*Any standard cleanroom materials.
+|-
+|}