Specific Process Knowledge/Characterization/KLA-Tencor Surfscan 6420: Difference between revisions
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'''<p style="color:red;">The KLA-Tencor Surfscan 6420 has has been decommisioned in April 2023 and replaced with the [[Specific_Process_Knowledge/Characterization/Particle_Scanner_Takano|Particle Scanner Takano]]. </p>''' | '''<p style="color:red;">The KLA-Tencor Surfscan 6420 has has been decommisioned in April 2023 and replaced with the [[Specific_Process_Knowledge/Characterization/Particle_Scanner_Takano|Particle Scanner Takano]]. </p>''' | ||
= KLA-Tencor Surfscan 6420 = | |||
[[image:Surfscan_at_FAT.JPG|300x300px|right|thumb|The KLA-Tencor Surfscan (at the place in California where it was refurbished).]] | [[image:Surfscan_at_FAT.JPG|300x300px|right|thumb|The KLA-Tencor Surfscan (at the place in California where it was refurbished).]] | ||
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'''[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=318 Surfscan 6420]''' | '''[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=318 Surfscan 6420]''' | ||
== Acceptance Test== | |||
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We have two calibration wafers for the KLA-Tencor Surfscan. The calibration wafers are 6" silicon wafers with a number of polystyrene latex spheres (PLS) uniformily spread over the surface. Those wafers have been used for the acceptance test. The mean diameter and number PLS's on each wafer are certified. | We have two calibration wafers for the KLA-Tencor Surfscan. The calibration wafers are 6" silicon wafers with a number of polystyrene latex spheres (PLS) uniformily spread over the surface. Those wafers have been used for the acceptance test. The mean diameter and number PLS's on each wafer are certified. | ||
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'''4" and 8" cassette''': A cassette of 25 wafers was handled two times. The scanning was then stopped to save time as handling of more cassettes is not expected to cause problems. | '''4" and 8" cassette''': A cassette of 25 wafers was handled two times. The scanning was then stopped to save time as handling of more cassettes is not expected to cause problems. | ||
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== | ==Process Parameters== | ||
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