Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/fluence: Difference between revisions
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== Fluence definition == | == Fluence definition == | ||
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The function <math>E_{pulse}</math> is defined as : | The function <math>E_{pulse}</math> is defined as: | ||
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Where <math>\overline{P}</math> (average power) is measured with the laser sensor power measurement (see [http://labmanager.danchip.dtu.dk/d4Show.php?id=2885&mach=309|laser manual],section 5.3) and the repetion rate (<math>f</math>) is set in the parameter file under " laser frequency". | Where <math>\overline{P}</math> (average power) is measured with the laser sensor power measurement (see [http://labmanager.danchip.dtu.dk/d4Show.php?id=2885&mach=309|laser manual],section 5.3) and the repetion rate (<math>f</math>) is set in the parameter file under " laser frequency". | ||
The fluence is therefore determinated as such : | The fluence is therefore determinated as such: | ||
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![[image:161214_FluenceVSrepRate_532nm_255mm.jpg|500x500px|thumb|center|Fluence result for green wavelength (532nm, F255mm)]] | ![[image:161214_FluenceVSrepRate_532nm_255mm.jpg|500x500px|thumb|center|Fluence result for green wavelength (532nm, F255mm)]] | ||
![[image:161214_FluenceVSrepRate_355nm_103mm.jpg|500x500px|thumb|center|Fluence result for UV wavelength (355nm, F103mm)]] | ![[image:161214_FluenceVSrepRate_355nm_103mm.jpg|500x500px|thumb|center|Fluence result for UV wavelength (355nm, F103mm)]] | ||
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![[image:060815_FluenceVSrepRate_355nm_255mm.jpg|500x500px|thumb|center|Fluence result for UV wavelength (355nm, F255mm)]] | |||
![[image:140618_FluenceVSrepRate_1064nm_IPG.jpg|500x500px|thumb|center|Fluence result for IR wavelength (IPG 1064nm, F255mm). The fluence at 100% and 10kHz must be expected around 25J/cm2]] | ![[image:140618_FluenceVSrepRate_1064nm_IPG.jpg|500x500px|thumb|center|Fluence result for IR wavelength (IPG 1064nm, F255mm). The fluence at 100% and 10kHz must be expected around 25J/cm2]] | ||
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