Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/fluence: Difference between revisions
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== Fluence definition == | == Fluence definition == | ||
The fluence produces by a laser is, by definition, the energy delivered by a laser pulse (<math>E_{pulse}</math>) per surface unit (<math> | The fluence produces by a laser is, by definition, the energy delivered by a laser pulse (<math>E_{pulse}</math>) per surface unit (<math>A</math>) and it is given in J/cm2. | ||
The function <math>E_{pulse}</math> is defined as : | The function <math>E_{pulse}</math> is defined as: | ||
: <math>E_{pulse} = \frac{\overline{P}}{f}\,</math> | : <math>E_{pulse} = \frac{\overline{P}}{f}\,</math> | ||
Where <math>\overline{P}</math> (average power) | Where <math>\overline{P}</math> (average power) is measured with the laser sensor power measurement (see [http://labmanager.danchip.dtu.dk/d4Show.php?id=2885&mach=309|laser manual],section 5.3) and the repetion rate (<math>f</math>) is set in the parameter file under " laser frequency". | ||
The fluence is therefore | The fluence is therefore determinated as such: | ||
: <math>Fluence = \frac{E_{pulse}}{ | : <math>Fluence = \frac{E_{pulse}}{A}\,</math> | ||
The | The area (<math>A</math>) can be determinate with the theoretical min spot diameter (1/e2), available [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Spot size and optics|here]] | ||
== Fluence results measurement== | == Fluence results measurement== | ||
The results below have been calculated with the theoretical [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Spot size and optics|spot size]] provided by 3D Micromac. | |||
{| border="1" cellspacing="2" cellpadding="2" | |||
![[image:161214_FluenceVSrepRate_1064nm_255mm.jpg|500x500px|thumb|center|Fluence result for IR wavelength (1064nm, F255mm)]] | |||
![[image:161214_FluenceVSrepRate_532nm_255mm.jpg|500x500px|thumb|center|Fluence result for green wavelength (532nm, F255mm)]] | |||
![[image:161214_FluenceVSrepRate_355nm_103mm.jpg|500x500px|thumb|center|Fluence result for UV wavelength (355nm, F103mm)]] | |||
|} | |||
{| border="1" cellspacing="2" cellpadding="2" | {| border="1" cellspacing="2" cellpadding="2" | ||
![[image: | ![[image:060815_FluenceVSrepRate_355nm_255mm.jpg|500x500px|thumb|center|Fluence result for UV wavelength (355nm, F255mm)]] | ||
![[image: | ![[image:140618_FluenceVSrepRate_1064nm_IPG.jpg|500x500px|thumb|center|Fluence result for IR wavelength (IPG 1064nm, F255mm). The fluence at 100% and 10kHz must be expected around 25J/cm2]] | ||
|} | |} | ||