Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/fluence: Difference between revisions

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-= Fluence =
+{{cc-nanolab}}
-The fluence produces by a laser is, by definition, the energy delivered by a laser pulse (<math>E_{pulse}</math>) per surface unit (<math>S</math>) and it is given in J/cm2.
+== Fluence definition ==
-The function <math>E_{pulse}</math> is defined as :
+The fluence produces by a laser is, by definition, the energy delivered by a laser pulse (<math>E_{pulse}</math>) per surface unit (<math>A</math>) and it is given in J/cm2.
+The function <math>E_{pulse}</math> is defined as:
 : <math>E_{pulse} = \frac{\overline{P}}{f}\,</math>
-Where <math>\overline{P}</math> (average power) and is measured with the laser sensor power measurement and the repetion rate (<math>f</math>) is set in the settings.
+Where <math>\overline{P}</math> (average power) is measured with the laser sensor power measurement (see [http://labmanager.danchip.dtu.dk/d4Show.php?id=2885&mach=309|laser manual],section 5.3) and the repetion rate (<math>f</math>) is set in the parameter file under " laser frequency".
+The fluence is therefore determinated as such:
+: <math>Fluence = \frac{E_{pulse}}{A}\,</math>
-The fluence is therefore determinate as such :
+The area (<math>A</math>) can be determinate with the theoretical min spot diameter (1/e2), available [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Spot size and optics|here]]
+== Fluence results measurement==
-: <math>Fluence = \frac{E_{pulse}}{S}\,</math>
+The results below have been calculated with the theoretical [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Spot size and optics|spot size]] provided by 3D Micromac.
-The theoretical spot sizes (<math>S</math>) can be found [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Spot size and optics|here]]
+{| border="1" cellspacing="2" cellpadding="2"
+![[image:161214_FluenceVSrepRate_1064nm_255mm.jpg|500x500px|thumb|center|Fluence result for IR wavelength (1064nm, F255mm)]]
+![[image:161214_FluenceVSrepRate_532nm_255mm.jpg|500x500px|thumb|center|Fluence result for green wavelength (532nm, F255mm)]]
+![[image:161214_FluenceVSrepRate_355nm_103mm.jpg|500x500px|thumb|center|Fluence result for UV wavelength (355nm, F103mm)]]
+|}
+{| border="1" cellspacing="2" cellpadding="2"
+![[image:060815_FluenceVSrepRate_355nm_255mm.jpg|500x500px|thumb|center|Fluence result for UV wavelength (355nm, F255mm)]]
+![[image:140618_FluenceVSrepRate_1064nm_IPG.jpg|500x500px|thumb|center|Fluence result for IR wavelength (IPG 1064nm, F255mm). The fluence at 100% and 10kHz must be expected around 25J/cm2]]
+|}