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==Test of the deposition rate of Silicon and film characteristics==
==Test of the deposition rate of Silicon and film characteristics==
Work done by Kristian Hagsted Rasmussen @Danchip before 2012
'''''The work in this section was done by Kristian Hagsted Rasmussen @DTU Nanolab (former DTU Danchip) before 2012 - '''''
 
'''''with followup by Berit Herstrøm (bghe) @DTU Nanolab.'''''
 
Please note that it is from 2022 no longer possible to deposit Si with the Ion beam etcher here at Nanolab.
 
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