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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/IBSD_of_Si click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/IBSD_of_Si click here]'''  


==Test of the deposition rate of Silicon and film characteristics==
==Test of the deposition rate of Silicon and film characteristics==
'''''The work in this section was done by Kristian Hagsted Rasmussen @DTU Nanolab (former DTU Danchip) before 2012 - '''''
'''''with followup by Berit Herstrøm (bghe) @DTU Nanolab.'''''
Please note that it is from 2022 no longer possible to deposit Si with the Ion beam etcher here at Nanolab.
{| border="2" cellspacing="1" cellpadding="3" align="left"
! 
!Recipe 2 - with the small grids)
|-
|Platen angle
|10 degrees
|-
|Platen rotation speed
|20rpm
|-
|Ar(N) flow
|4 sccm
|-
|Ar(dep. source) flow
|8 sccm
|-
|I(N)
|240mA
|-
|Power setting
|700W
|-
|I(B)
|200mA
|-
|V(B)
|1100V
|-
|Vacc(B)
|400V
|-
|}
<br clear="all" />
===Results with recipe 2 and the small grids===
{| border="2" cellspacing="1" cellpadding="3" align="left"
!Depostion time
!10 min (2016-08-04 bghe)
|-
|Characterization method
|Ellipsometer 3 angles
|-
|Deposition thickness
|50 nm (2016-08-04 bghe)
|-
|Deposition rate
|5.0 nm/min
|-
|Refractive index @632nm
|
n=? <br/>
k=?
|-
|Refractive index @1000nm <br/>
@950nm using the ellipsometer
|
n=? <br/>
k=?
|-
|Refractive index @1550nm <br/>
|
n=? <br/>
k=?
|-
|}
<br clear="all" />


===Recipe===
===Recipe===
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{| border="2" cellspacing="1" cellpadding="3" align="left"
{| border="2" cellspacing="1" cellpadding="3" align="left"
!&nbsp;
!&nbsp;
!Recipe 1 - with the old (large) grids)
!Recipe 1 - with the large grids)
|-
|-
|Platen angle
|Platen angle
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<br clear="all" />
<br clear="all" />


===Results with recipe 1 and the old (large) grids===
===Results with recipe 1 and the large grids===


{| border="2" cellspacing="1" cellpadding="3" align="left"
{| border="2" cellspacing="1" cellpadding="3" align="left"
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