Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBSD of Si: Difference between revisions
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==Test of the deposition rate and film characteristics== | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/IBSD_of_Si click here]''' | ||
==Test of the deposition rate of Silicon and film characteristics== | |||
'''''The work in this section was done by Kristian Hagsted Rasmussen @DTU Nanolab (former DTU Danchip) before 2012 - ''''' | |||
'''''with followup by Berit Herstrøm (bghe) @DTU Nanolab.''''' | |||
Please note that it is from 2022 no longer possible to deposit Si with the Ion beam etcher here at Nanolab. | |||
{| border="2" cellspacing="1" cellpadding="3" align="left" | |||
! | |||
!Recipe 2 - with the small grids) | |||
|- | |||
|Platen angle | |||
|10 degrees | |||
|- | |||
|Platen rotation speed | |||
|20rpm | |||
|- | |||
|Ar(N) flow | |||
|4 sccm | |||
|- | |||
|Ar(dep. source) flow | |||
|8 sccm | |||
|- | |||
|I(N) | |||
|240mA | |||
|- | |||
|Power setting | |||
|700W | |||
|- | |||
|I(B) | |||
|200mA | |||
|- | |||
|V(B) | |||
|1100V | |||
|- | |||
|Vacc(B) | |||
|400V | |||
|- | |||
|} | |||
<br clear="all" /> | |||
===Results with recipe 2 and the small grids=== | |||
{| border="2" cellspacing="1" cellpadding="3" align="left" | |||
!Depostion time | |||
!10 min (2016-08-04 bghe) | |||
|- | |||
|Characterization method | |||
|Ellipsometer 3 angles | |||
|- | |||
|Deposition thickness | |||
|50 nm (2016-08-04 bghe) | |||
|- | |||
|Deposition rate | |||
|5.0 nm/min | |||
|- | |||
|Refractive index @632nm | |||
| | |||
n=? <br/> | |||
k=? | |||
|- | |||
|Refractive index @1000nm <br/> | |||
@950nm using the ellipsometer | |||
| | |||
n=? <br/> | |||
k=? | |||
|- | |||
|Refractive index @1550nm <br/> | |||
| | |||
n=? <br/> | |||
k=? | |||
|- | |||
|} | |||
<br clear="all" /> | |||
===Recipe=== | ===Recipe=== | ||
{| border="2" cellspacing="1" cellpadding="3" align="left" | {| border="2" cellspacing="1" cellpadding="3" align="left" | ||
! | ! | ||
!Recipe 1 | !Recipe 1 - with the large grids) | ||
|- | |- | ||
|Platen angle | |Platen angle | ||
| Line 38: | Line 118: | ||
<br clear="all" /> | <br clear="all" /> | ||
===Results=== | ===Results with recipe 1 and the large grids=== | ||
{| border="2" cellspacing="1" cellpadding="3" align="left" | {| border="2" cellspacing="1" cellpadding="3" align="left" | ||
| Line 94: | Line 174: | ||
k=0.183 | k=0.183 | ||
|- | |- | ||
|Refractive index @ | |Refractive index @1550nm <br/> | ||
| | | | ||
n=? <br/> | n=? <br/> | ||