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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/Microscopy_314-307/SEM/Nova click here]'''


=The FEI Nova 600 NanoSEM=
''This section is written by DTU Nanolab internal if nothing else is stated.''
[[Category:314]]
[[Category:314-Microscopy]]


The FEI Nova 600 NanoSEM Scanning Electron Microscope is a very versatile characterization instrument that produces enlarged images of a variety of specimens, achieving magnifications of over 500.000 times providing ultra high resolution imaging. At the time being this microscope is mainly designated for microstructural characterization using [http://en.wikipedia.org/wiki/Electron_backscatter_diffraction electron backscatter diffraction (EBSD)] , [http://en.wikipedia.org/wiki/Energy-dispersive_X-ray_spectroscopy Energy-dispersive X-ray spectroscopy (EDS)] and forward scatter electron imaging by detectors recently bought from [http://www.bruker.com/ Bruker]. 
[[File:Warning Computer Machine.png|left|100x100px]]
= Who may operate the FEI SEM =
Currently, [http://www.dtu.dk/english/Service/Phonebook/Person?id=44570&tab=1 Dr. Alice Bastos Fanta] is co-ordinating all the activities that take place on FEI Nova 600 NanoSEM. So she must be informed about the planned activities before hand in the bi-weekly meetings which are held at DTU Nanolab. Alice makes the bookings in agreement with all the users.
The rules of who may operate the FEI SEM and to what extent they may operate it are:


* '''Only users who have been trained and approved by DTU Nanolab personnel may operate the instrument. '''Irregardless of their prior experience any new user with no official DTU Nanolab training or approval cannot operate the instrument, not even under close supervision by experienced users.
== The Nova NanoSEM is not available at DTU Nanolab any longer. The information here is just for reference. ==
<br />
 
=The FEI Nova nanoSEM 600=
 
The Nova is, in it's normal configuration, a very versatile characterisation instrument. Capable of producing enlarged images of a variety of specimens and achieving magnifications of over 500.000 times with ultra high resolution imaging in both high and low vacuum. The Nova has become highly evolved in it’s life at DTU Nanolab and it is possible to carry out advanced processes including in-situ experiments using heat, gas injection and probing. At the time being this microscope is mainly designated for advanced microstructural characterisation and particle analysis techniques using [http://en.wikipedia.org/wiki/Electron_backscatter_diffraction electron backscatter diffraction (EBSD)] ,[http://en.wikipedia.org/wiki/Energy-dispersive_X-ray_spectroscopy Energy-dispersive X-ray spectroscopy (EDS)] and forward scatter electron imaging by detectors recently bought from [http://www.bruker.com/ Bruker].
 
= Who may operate the Nova =
There are restrictions on who is given access to the Nova due to the development activities of the Bruker detectors fitted to the tool.
Currently, [http://www.dtu.dk/english/Service/Phonebook/Person?id=44570&tab=1 Dr. Alice Bastos Fanta] is co-ordinating the activities that take place on Nova. Alice is consulted about the planned activities beforehand in the bi-weekly meetings which are held at DTU Nanolab and coordinates the bookings in agreement with all the users.
The rules of who may operate the Nova and to what extent they may operate it are:
 
* '''Only users who have been trained and approved by DTU Nanolab personnel may operate the instrument. '''Irregardless of their prior experience any new user without official DTU Nanolab training or approval may not operate the instrument, not even under close supervision by experienced users.


*'''Users may only use the instrument to the extent they have been trained.''' This means that one should not try to operate the following options/capabilities without explicit training:
*'''Users may only use the instrument to the extent they have been trained.''' This means that one should not try to operate the following options/capabilities without explicit training:
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** EDX capability
** EDX capability
** Backscatter detectors
** Backscatter detectors
**STEM


= How to operate the FEI Nova 600 NanoSEM =
= How to operate the Nova =


To find the basic instructions for operating the instrument, the reader is referred to the labmanager manual.
To find the basic instructions for operating the instrument, the reader is referred to the labmanager manual.


= Processing guidelines on the FEI SEM =
= Processing guidelines on the Nova =


When one combines the 6 different detectors, 2 vacuum modes and 3 SEM modes with the traditional SEM parameters such as high voltage, working distance, spot sizes etc. it is clear that the FEI SEM has a huge number of different ways to be operated in. The number of ways that produce ultra high quality images is, however, limited. It is therefore crucial that the operators share their knowledge of how to obtain great images.
When one combines the 6 different detectors, 2 vacuum modes and 3 SEM modes with the traditional SEM parameters such as high voltage, working distance, spot sizes etc. it is clear that the FEI SEM has a huge number of different ways to be operated in. The number of ways that produce ultra high quality images is, however, limited. It is therefore crucial that the operators share their knowledge of how to obtain great images.
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: The TLD and Helix detectors do not provide large field of view and depth of focus when operated in SEM mode II.
: The TLD and Helix detectors do not provide large field of view and depth of focus when operated in SEM mode II.


== Detectors on the FEI SEM==
== Detectors on the Nova==


The FEI SEM has 6 electron detectors and 1 photon (X-ray) detector.
The Nova has 8 electron detectors and 2 photon (X-ray) detectors.


{| border="2" cellspacing="0" cellpadding="4" align="center"
{| border="2" cellspacing="0" cellpadding="4" align="left"
!Tag  
!Tag  
!Name
!Name
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|1, 2 and 3
|1, 2 and 3
|-
|-
!EBSD  
!EBSD/TKD
|Electron Backscatter Diffraction
|Electron Backscatter Diffraction
|HiVac
|HiVac+LowVac
|BSE
|BSE
|1 and 3
|1 and 2
|-
|-
!ARGUS  
!ARGUS  
|ARGUS(TM)
|ARGUS(TM)
|HiVac
|HiVac+LowVac
|BSE
|BSE,FSE and STEM (BF and DF)
|1 and 3
|1 and 2
|-
|-
!LVD
!LVD
|Low Vacuum Detector
|Low Vacuum Detector
|LoVac
|LowVac
|SE + BSE
|SE + BSE
|1 and 3
|1 and 3
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!Helix
!Helix
|High resolution Low Vacuum detector
|High resolution Low Vacuum detector
|LoVac
|LowVac
|SE
|SE
|1, 2 and 3
|1, 2 and 3
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!GAD
!GAD
|Gaseous Analytical Detector
|Gaseous Analytical Detector
|HiVac and Lovac
|HiVac and Lowvac
|SE + BSE
|BSE
|1, 2 and 3
|1, 2 and 3
|-  
|-  
!EDX
!EDS
|Energy Dispersive X-ray detector
|Energy Dispersive X-ray detector
|HiVac and Lovac
|HiVac and Lowvac
|X-ray photons
|1,2 and 3
|-
!EDS
|Flat Quad X-ray detector
|HiVac ONLY
|X-ray photons
|X-ray photons
|2 and 3  
|1,2 and 3  
|}
|}


<br clear="all" />
==Equipment performance and process related parameters==
==Equipment performance and process related parameters==
{| border="2" cellspacing="0" cellpadding="0"  
{| border="2" cellspacing="0" cellpadding="0"  
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* R: 360<sup>o</sup> (piezo)
* R: 360<sup>o</sup> (piezo)
|-
|-
|style="background:LightGrey; color:black" align="center"|Peltier stage
|style="background:LightGrey; color:black" align="center"|FlatQuad EDS
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* FEI Peltier stage -10<sup>o</sup> to 22<sup>o</sup>
* Bruker FlatQuad (High Vacuum ONLY)
|-
|-
|style="background:LightGrey; color:black" align="center"|EBSD/TKD
|style="background:LightGrey; color:black" align="center"|EBSD/TKD
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* High vacuum (10<sup>-4</sup> Pa), Low vacuum mode (up to 130Pa)
* High vacuum (10<sup>-4</sup> Pa), Low vacuum mode (up to 130Pa)
|-
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Samples
|style="background:LightGrey; color:black" align="center"|Sample sizes
|style="background:LightGrey; color:black" align="center"|Sample sizes
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
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|}
|}


'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/314/SEM/QFEG click here]'''


=Characterization Techniques=
=Characterization Techniques=
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*[[/Transmission Kikuchi diffraction|Transmission Kikuchi diffraction]]
*[[/Transmission Kikuchi diffraction|Transmission Kikuchi diffraction]]
*[[/Micro 4-point probe|Micro 4-point probe]]
*[[/Micro 4-point probe|Micro 4-point probe]]
 
*[[:File:In situ x-ray diffraction and electron microscopy investigations of noncatalytic metal oxide nanowire growth.pdf]]
 
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/SEM/Nova click here]'''
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