Jump to content

Specific Process Knowledge/Wafer cleaning/Bring samples into cleanroom: Difference between revisions

← Older edit
VisualWikitext
Mmat (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers, Administrators
1,954 edits
Mmat (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers, Administrators
1,954 edits
 
Line 25: Line 25:


===Procedure===
===Procedure===
The bench in gowning contains a sink, an ultrasonics bath and a rinse bath for rinsing samples cleaned in Triton X-100. To clean the samples:  
The bench in the gowning contains a sink, an ultrasonics bath and a rinse bath for rinsing samples cleaned in Triton X-100. To clean the samples:  


*Find a suitable holder for your samples in the cupboard below the baths
*Find a suitable holder for your samples in the cupboard below the baths
*Make sure the ultrasonics bath dump valve is closed
*Make sure the ultrasonics bath dump valve is closed
*Fill the ultrasonics bath (the one made of metal) with DI water (enough to completely cover your samples)
*Fill the ultrasonics bath (the one made of metal) with DI water until your samples are completely covered
*Add 20 - 30 drops of diluted Triton X-100 detergent (From the rinse/spray bottle. Do '''''NOT''''' use undiluted Triton X-100)
*Add 20 - 30 drops of diluted Triton X-100 detergent from the rinse/spray bottle. Do '''''NOT''''' use undiluted Triton X-100
*Close the bath lid to minimize noise from the ultrasonics bath
*Close the bath lid to minimize noise from the ultrasonics bath
*Start ultrasonics on the front panel
*Start the ultrasound on the front panel
*Leave sample in ultrasonics for 10 min
*Leave the samples in ultrasonics for 10 min
*Switch off ultrasonics
*Switch off ultrasound
*Fill rinse bath (the one made in plastic) with DI water and rinse your samples
*Fill the rinse bath (the one made in plastic) with DI water and rinse your samples thoroughly
*Remove samples and dry them
*Remove and dry your samples
*Dump the Triton X-100 solution and rinse baths to drain. Rinse tanks with DI water. Leave dump valves open so the baths drain completely
*Dump the Triton X-100 solution and rinse bath. Rinse both tanks with DI water. Leave dump valves open so the baths drain completely
*Continue with [http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning/7-up_%26_Piranha piranha].
*Continue with [http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning/7-up_%26_Piranha Piranha] cleaning.
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Wafer_cleaning/Bring_samples_into_cleanroom"