Specific Process Knowledge/Etch/DRIE-Pegasus/DUVetch/nBoost04: Difference between revisions
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<!--Checked for updates on 30/7-2018 - ok/jmli --> | |||
<!--Page reviewed by jmli 9/8-2022 --> | |||
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| 3 minute TDESC clean + 30 sec barc etch | | 3 minute TDESC clean + 30 sec barc etch | ||
| | | nanolab/jml/nano/nanoboost/nboost04 100 cycles or 13 minutes | ||
| S004436 | | S004436 | ||
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