Specific Process Knowledge/Etch/DRIE-Pegasus/Etch 3 dimensional silicon microstructures: Difference between revisions
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<!-- Ok, jmli 2020-0120 --> | <!-- Ok, jmli 2020-0120 --> | ||
'''Feedback to this page''': '''[mailto:labadviser@ | <!-- Page reviewed 9/8-2022 jmli --> | ||
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/Etch_3_dimensional_silicon_microstructures click here]''' | |||
* ''This work was done by Henri Jansen and Bingdong Chang in 2017;'' | * ''This work was done by Henri Jansen and Bingdong Chang in 2017;'' | ||