Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinan331-2: Difference between revisions
Created page with "== The Sinano3.31 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.31''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl<sub>3</sub> 5 sccm, ..." |
No edit summary |
||
| (4 intermediate revisions by the same user not shown) | |||
| Line 1: | Line 1: | ||
<!--Checked for updates on 10/7-2019 - ok/jmli --> | |||
<!-- Ok, jmli 20170627 --> | |||
<!--Checked for updates on 24/8-2021. ok/ jmli--> | |||
== The Sinano3.31 recipe == | == The Sinano3.31 recipe == | ||
<!-- revised 1/6-2015 by jmli --> | |||
<!--Checked for updates on 4/4-2025 - ok/jmli --> | |||
{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||