Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano1: Difference between revisions
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== The first nanoetch recipe == | == The first nanoetch recipe == | ||
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{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||
|+ '''The starting point''' | |+ '''The starting point''' | ||