Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano1: Difference between revisions
No edit summary |
|||
| (3 intermediate revisions by the same user not shown) | |||
| Line 1: | Line 1: | ||
<!--Checked for updates on 10/7-2019 - ok/jmli --> | |||
<!-- Ok, jmli 20170627 --> | <!-- Ok, jmli 20170627 --> | ||
<!-- Ok, jmli 20170627 --> | |||
<!--Checked for updates on 24/8-2021. ok/ jmli--> | |||
<!--Checked for updates on 4/4-2025 - ok/jmli --> | |||
== The first nanoetch recipe == | == The first nanoetch recipe == | ||