Specific Process Knowledge/Etch/DRIE-Pegasus/nanobosch/nanobosch6: Difference between revisions
Created page with "== Test run using AZ resist 24/9-2012 == {| border="2" cellpadding="2" cellspacing="1" |+ '''Process conditions''' |- ! rowspan="4" align="center"| Substrate information ! W..." |
No edit summary |
||
| (5 intermediate revisions by the same user not shown) | |||
| Line 1: | Line 1: | ||
<!--Checked for updates on 10/7-2019 - ok/jmli --> | |||
<!-- Ok, jmli 20170627 --> | |||
<!-- Ok, jmli 20170627 --> | |||
<!--Checked for updates on 24/8-2021. ok/ jmli--> | |||
<!--Checked for updates on 4/4-2025 - ok/jmli --> | |||
== Test run using AZ resist 24/9-2012 == | == Test run using AZ resist 24/9-2012 == | ||
<!-- revised 1/6-2015 by jmli --> | |||
{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||
|+ '''Process conditions''' | |+ '''Process conditions''' | ||
| Line 41: | Line 47: | ||
image:Peg-C01296.05-no.14.jpg| | image:Peg-C01296.05-no.14.jpg| | ||
</gallery> | </gallery> | ||
== Test run using AZ resist 24/9-2012 == | == Test run using AZ resist 24/9-2012 == | ||