Specific Process Knowledge/Etch/DRIE-Pegasus/nanobosch/nb-1.0: Difference between revisions
No edit summary |
No edit summary |
||
| (One intermediate revision by the same user not shown) | |||
| Line 2: | Line 2: | ||
<!-- Ok, jmli 20170627 --> | <!-- Ok, jmli 20170627 --> | ||
<!-- Ok, jmli 20170627 --> | <!-- Ok, jmli 20170627 --> | ||
<!--Checked for updates on 24/8-2021. ok/ jmli--> | |||
<!--Checked for updates on 4/4-2025 - ok/jmli --> | |||
== Trial runs on HTF stepper wafers 22/6-2012 == | == Trial runs on HTF stepper wafers 22/6-2012 == | ||
<!-- revised 1/6-2015 by jmli --> | <!-- revised 1/6-2015 by jmli --> | ||