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Specific Process Knowledge/Etch/Etching of SU-8: Difference between revisions

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<!--Checked for updates on 30/7-2018 - ok/jmli -->
<!--Checked for updates on 30/7-2018 - ok/jmli -->
<!--Page reviewed by jmli 9/8-2022  -->
<!--Page reviewed by bghe 31/3-2024  -->


==Etching of SU-8==
==Etching of SU-8==
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{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
|+ '''SU8aniso and SU8iso etches''' by khara@danchip
|+ '''SU8aniso and SU8iso etches''' by khara@nanolab
|-
|-
! Parameter
! Parameter
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