Specific Process Knowledge/Etch/Etching of Titanium: Difference between revisions
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<!--Page reviewed by jmli 1/8-2016 --> | <!--Page reviewed by jmli 1/8-2016 --> | ||
==Etching of Titanium== | ==Etching of Titanium== | ||
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*smaller pieces on a carrier wafer | *smaller pieces on a carrier wafer | ||
*<nowiki>#</nowiki>1 100mm wafers ( | *<nowiki>#</nowiki>1 100mm wafers (if you place it/bond it on a 150 mm carrier wafer) | ||
*<nowiki>#</nowiki>1 150mm wafers | *<nowiki>#</nowiki>1 150mm wafers | ||
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Smaller pieces glued to carrier wafer | Smaller pieces glued to carrier wafer | ||