Jump to content

Specific Process Knowledge/Etch/Etching of Aluminium: Difference between revisions

← Older edit
VisualWikitext
Rkch (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
284 edits
No edit summary
Mbec (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
191 edits
No edit summary
 
(One intermediate revision by one other user not shown)
Line 3: Line 3:
'''All links to Kemibrug (SDS) and Labmanager Including APV and QC requires login.'''
'''All links to Kemibrug (SDS) and Labmanager Including APV and QC requires login.'''


'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Etching_of_Aluminium click here]'''
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Etching_of_Aluminium click here]'''
<!--Page reviewed by jmli 1/8-2016  -->
<!--Page reviewed by jmli 1/8-2016  -->
<!-- Ok, jmli 2020-0120 -->
<!-- Ok, jmli 2020-0120 -->
Line 44: Line 44:
*~60-100nm/min
*~60-100nm/min
|
|
*~0.5nm/sec (pure Al)
*~30nm/min (pure Al)
|
|
*~350 nm/min (depending on features size and etch load)  
*~350 nm/min (depending on features size and etch load)  
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/Etching_of_Aluminium"