Deposition of SiN with PECVD4/NEW TESTS QC: Difference between revisions
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'''''Unless otherwise stated, this page is written by DTU Nanolab internal (Feb 2025 | '''''Unless otherwise stated, this page is written by DTU Nanolab internal (Feb 2025), for more info contact mfarin.''''' | ||
== New QC tests on Silicon nitride - PECVD4 == | == New QC tests on Silicon nitride - PECVD4 == | ||
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=== Data with HF generator=25W === | === Data with HF generator=25W === | ||
[[File:25W - thickness PECVD4 nitride QC.png|left|thumb| | [[File:25W - thickness PECVD4 nitride QC.png|left|thumb|435x435px|Data from november to february of 15min QC nitride using 25W. The graph showcases thickness with standard error across time.]] | ||
[[File:25W - Thickness filmtek vs ellipsometer.png|thumb|436x436px|Wafers processed with 25W had the thickness measured in both Filmtek and Ellipsometer, comparing the results.]] | |||
[[File:25W - refractive index QC nitride.png|left|thumb|435x435px|Data from november to february of 15min QC nitride using 25W. The graph showcases the refractive index with standard error across time.]] | |||
[[File:25W - refractive index filmtek vs ellipsometer.png|thumb|436x436px|Wafers processed with 25W had the refractive index measured in both Filmtek and Ellipsometer, comparing the results.]] | |||
[[File:25W - reflected power QC nitride.png|thumb|593x593px|Reflected power of different tests, with 25W as the demanded power.|center]] | |||
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=== Data with HF generator=100W === | === Data with HF generator=100W === | ||
[[File:100W - thickness QC nitride.png|left|Data from november to february of 15min QC nitride using 100W. The graph showcases thickness with standard error across time.|thumb|435x435px]] | |||
[[File:100W - thickness ellip vs filmtek.png|thumb|435x435px|Wafers processed with 100W had the thickness measured in both Filmtek and Ellipsometer, comparing the results.]] | |||
[[File:100W - refractive index QC nitride.png|left|thumb|436x436px|Data from november to february of 15min QC nitride using 100W. The graph showcases the refractive index with standard error across time.]] | |||
[[File:100W refractive index ellip vs filmtek.png|thumb|435x435px|Wafers processed with 100W had the refractive index measured in both Filmtek and Ellipsometer, comparing the results.]] | |||
[[File:100W reflected power QC nitride.png|center|thumb|593x593px|Reflected power of different tests, with 100W as the demanded power.]] | |||