LabAdviser/Courses/TPT Dry Etch

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Dry Etch Tool Package Training

DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would like to use via training@nanolab.dtu.dk.

The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.

Course Layout

1. Online lecture videos (theory)
2. Quizzes for each section
3. Online training videos (equipment operation)
4. Group hands-on training
5. Individual hands-on training (specific equipment)

The individual hands-on training can be requested via training@nanolab.dtu.dk.

Learning objectives

• Generation and Characteristics of the Etch Plasma
• Introduction to dry etch process
• Tuning of the dry etch process
• Overview of the dry etch equipment at Nanolab

After the course you will be able to

• Know why and when to use dry etching
• Use the dry etchers without harming the machines
• Select the right instrument to use for his/her dry etch processing
• Select an appropriate etch recipe for his/her dry etch processing
• Spot when the recipe needs to be tuned for his/her needs and
• Suggest relevant tuning parameters

Qualifying Prerequisites

• Cleanroom safety course at DTU Nanolab
• Admission to the cleanroom must be obtained before the group training session

Course Responsible

• Jonas Michael-Lindhard
• Berit Herstrøm

If you have questions you can contact us via dryetch@nanolab.dtu.dk.

Material for preparations and further information (see also DTU Learn)

Literature No extra Literature at the moment Slides from Lecture Lecture slides with explanatory text included [1] (login required)	Lecture videos (Watch before the question and evaluation session) The 9 lecture videos can be found on YouTube: Lecture videos Pre hands-on training videos (Watch before the hands-on training) The 13 Hands-on training vidoes can be found on YouTube:Pre hands-on training videos