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{{cc-nanolab}}
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Dry_Etch click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Dry_Etch click here]'''  


==The Dry Etch TPT  ==
==Dry Etch Tool Package Training==
 
DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would  like to use via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. 
DTU Nanolab offers a Tool Package Training in dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.  
<BR>
 
<BR>
The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.
The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here].
 
<BR>
 
<BR>
{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
'''Course Layout'''
|-
<BR>
 
# Online lecture videos (theory)
|-
# Quizzes for each section
|-style="background:White; color:black; text-align:center"
# Online training videos (equipment operation)
!colspan="2"|Dry Etch Tool Package Training
# Group hands-on training
|-
# Individual hands-on training (specific equipment)
!Signing up for the course - Course material
<BR>
|
''The individual hands-on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''
The course is in DTU Learn. You sign up for the course by enroling yourself in the course "DTU Nanolab TPT: Dry Etch".
<BR>
*Log into DTU Learn here: [https://learn.inside.dtu.dk DTU Learn]
<BR>
*Select the menu "Discover"
'''Learning objectives'''
*Search for "Nanolab"
<BR>
Select the course "DTU Nanolab TPT:Dry Etch"
* Generation and Characteristics of the Etch Plasma
*Press "Enroll in Course"
* Introduction to dry etch process
*You have now signed up for the course.
* Tuning of the dry etch process
*Go to the course page in DTU Learn and choose "Course Content" and "Content"
* Overview of the dry etch equipment at Nanolab
*You have to read it all and go through all the material in the Dry Etch TPT.
<BR>
|-
''After the course you will be able to''  
<!--
* Know why and when to use dry etching
|-
* Use the dry etchers without harming the machines
!Schedule
* Select the right instrument to use for his/her dry etch processing
|
* Select an appropriate etch recipe for his/her dry etch processing
'''Theoretical part'''
* Spot when the recipe needs to be tuned for his/her needs and
* A 3-hour lecture. The lecture is on videos. the videos can be found on YouTube, see link below. You can also find the slides with notes below. It can be helpful to print out the lecture slide for your notes and questions while watching the videos. After seeing the videos you need to go though a quiz (assignment). You will get a link to the quiz when signing up for the Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: [https://doodle.com/poll/awkny9e952arxbxm Dry Etch TPT Lecture doodle]. The Question&Evaluation session takes place in room: 347-078 normally. At the moment we can do the Question&Evaluation session online.
* Suggest relevant tuning parameters
 
<BR>
'''Practical part'''
'''Qualifying Prerequisites'''
* A 2 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session. Before this you need to watch the "Pre hands-on training videos"
<BR>
|-
|-
!Location
|
'''Theoretical part  (the question&evaluation session)'''
* Room: 347-R078 (or Zoom)
'''Practical part'''
* The training session takes place inside the cleanroom. The meeting point will be in The gowning area.
|-
 
|-
!Qualified Prerequisites
|
* Cleanroom safety course at DTU Nanolab  
* Cleanroom safety course at DTU Nanolab  
* Admission to the cleanroom must be obtained before the training session
* Admission to the cleanroom must be obtained before the group training session
|-
<BR>
 
'''Course Responsible'''
|-
!Preparations
|
'''Before the Question&Evaluation session'''
*Watch the lecture videos, see link to the videos below. And go though the quiz (assignment).
*If you are not familiar with dry etching we advice you to read through the "Lecture slides with explanatory text included" [[:File:TPT Dry etching April2018 with notes.pdf]] before or after watching the videos and during answering the quiz.
 
'''Before training session'''
* Watch the training video: TPT hands-on intro
* Watch the screen cast video's for the ASE/AOE software
* Watch the screen cast video's for the DRIE/ICP metal and III-V ICP<br>
These are on YouTube and you can find a link to the videos below
|-
 
|-
!Course Responsible
|
'''The Dry Etch Group at DTU Nanolab'''
*Jonas Michael-Lindhard
*Jonas Michael-Lindhard
*Berit Herstrøm
*Berit Herstrøm
 
<BR>
If you have questions you can contact us by e-mailing [mailto:dryetch@nanolab.dtu.dk dryetch@nanolab.dtu.dk].  
If you have questions you can contact us via [mailto:dryetch@nanolab.dtu.dk dryetch@nanolab.dtu.dk].  
|-
-->
|-
!Learning Objectives
|
*Know why and when to use dry etching
*Use the dry etchers without harming the machines
*Select the right instrument to use for his/her dry etch processing
*Select an appropriate etch recipe for his/her dry etch processing
*Spot when the recipe needs to be tuned for his/her needs and
*Suggest relevant tuning parameters
|-
 
|}
 
<br clear="all" />
<br clear="all" />
 
<BR>
===Material for preparations and further information (You will also find this in the course material inside DTU Learn)===
===Material for preparations and further information ''(see also DTU Learn)''===
{| style="color: black;" width="90%"  
{| style="color: black;" width="90%"  
| colspan="2" |  
| colspan="2" |  
Line 102: Line 58:
'''<big>Slides from Lecture</big>'''
'''<big>Slides from Lecture</big>'''


<!--
*Lecture powerpoint slide show [[:File:TPT Dry etching April2018.pptx]]
*Lecture powerpoint slide show [[:File:TPT Dry etching April2018.pptx]]
*Lecture slides with explanatory text included [https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=7&name=Lecture+Power+point+with+notes+dec+2020.pdf], ''requires login''
-->
*Lecture slides with explanatory text included [https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=7&name=Lecture+Power+point+with+notes+dec+2020.pdf] ''(login required)''


| style="width: 20%" valign="top"|
| style="width: 20%" valign="top"|
'''<big>Lecture videos  </big>'''<br>
'''<big>Lecture videos  </big>'''<br>
(Watch before the question and evaluation session)<br>
''(Watch before the question and evaluation session)''<br>
 
*The 9 lecture videos can be found on YouTube here: [https://www.youtube.com/playlist?list=PLjWVU97LayHBu0XwMGHss5CdEhka6B72U Lecture videos]


* The 9 lecture videos can be found on YouTube: [https://www.youtube.com/playlist?list=PLjWVU97LayHBu0XwMGHss5CdEhka6B72U Lecture videos]
'''<big>Pre hands-on training videos </big>'''<br>
'''<big>Pre hands-on training videos </big>'''<br>
(Watch before the hands-on training)
''(Watch before the hands-on training)''
*The 13 pre hands-on training vidoes can be found on You Tube here:[https://www.youtube.com/playlist?list=PLjWVU97LayHC9cl0cuB65m-FlIScBd5t9 Pre hands-on training videos]<br>
<!--
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/TPThands-on_IntroAndWafer_extra-720p.mp4 TPT hands-on intro 6min6s]
Screen cast videos for the DRIE, ICP metal and III-V ICP:
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Overview_HiRes-720p.mp4 Overview 3min25s]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=19b8e1bfcd514c0e01eee7df416a0449&cHash=94480d4d38ce36a2a7621cdfab1054b2 Running processes]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=ac1c07ec933f7f138ec1788569cd568e&cHash=e73d3b0cc4fd5f8763c0c42d96bc7adc Recipes]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=ef3a91e929cce443fb2388bae35acf41&cHash=7d104e10f1da36ec01097059d6ee441b The Bosch Processes]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/Automatic_Processing_DRIE-720p.mp4 Automatic processing at the DRIE-Pegasus 14min56s]


Screen cast videos for the ASE and AOE:
* The 13 Hands-on training vidoes can be found on YouTube:[https://www.youtube.com/playlist?list=PLjWVU97LayHC9cl0cuB65m-FlIScBd5t9 Pre hands-on training videos]<br>
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=3c9e59310178de0c548d437712f077c2&cHash=e8c7fe4f4ff14672c970a94ec093cb8e Intro]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=3ec3324cdd5df30e38c4215e138c0f3b&cHash=fee573a639b0f5b6cfd1cd058b8376ec Load and Transfer]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=5dc5bdbcc2842364c6bcb23735cd42e0&cHash=f046044c1603f61fd6af4e0b0264955b Recipe Editor]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=372bc3286dcee3303214c268e14e5663&cHash=ae70bb52ca1c611c9fc7602bcd613ec5 The Bosch Process]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=b4deb2d0030f3141f41a4497375bf861&cHash=a75fab158fec382198b74336cba7bdc4 Run a Process]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=b995b7088690f218f73c24a6bd6361ad&cHash=c6076806edcff2f12036b4e41cbee14d Removing a Wafer from the Load Lock]
*[http://podcast.llab.dtu.dk/feeds/dtu-danchip/?tx_enotepodcast_pi1%5BshowDetails%5D=742052c10f9e77778ffab73561b9e840&cHash=44832011bb363b1162900338c834c785 The Process Log]
 
-->
| style="width: 20%"|


<br clear="all" />
|}
|}
<br clear="all" />

Latest revision as of 23:03, 24 February 2025

The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.

Feedback to this page: click here

Dry Etch Tool Package Training

DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would like to use via training@nanolab.dtu.dk.

The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.

Course Layout

  1. Online lecture videos (theory)
  2. Quizzes for each section
  3. Online training videos (equipment operation)
  4. Group hands-on training
  5. Individual hands-on training (specific equipment)


The individual hands-on training can be requested via training@nanolab.dtu.dk.

Learning objectives

  • Generation and Characteristics of the Etch Plasma
  • Introduction to dry etch process
  • Tuning of the dry etch process
  • Overview of the dry etch equipment at Nanolab


After the course you will be able to

  • Know why and when to use dry etching
  • Use the dry etchers without harming the machines
  • Select the right instrument to use for his/her dry etch processing
  • Select an appropriate etch recipe for his/her dry etch processing
  • Spot when the recipe needs to be tuned for his/her needs and
  • Suggest relevant tuning parameters


Qualifying Prerequisites

  • Cleanroom safety course at DTU Nanolab
  • Admission to the cleanroom must be obtained before the group training session


Course Responsible

  • Jonas Michael-Lindhard
  • Berit Herstrøm


If you have questions you can contact us via dryetch@nanolab.dtu.dk.

Material for preparations and further information (see also DTU Learn)

Literature

  • No extra Literature at the moment

Slides from Lecture

  • Lecture slides with explanatory text included [1] (login required)

Lecture videos
(Watch before the question and evaluation session)

Pre hands-on training videos
(Watch before the hands-on training)


Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=LabAdviser/Courses/TPT_Dry_Etch&oldid=50994"