LabAdviser/Courses/TPT Dry Etch: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Dry_Etch click here]''' | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Dry_Etch click here]''' | ||
== | ==Dry Etch Tool Package Training== | ||
DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would like to use via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. | |||
DTU Nanolab offers a Tool Package Training | <BR> | ||
<BR> | |||
The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. | The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here]. | ||
<BR> | |||
<BR> | |||
'''Course Layout''' | |||
<BR> | |||
# Online lecture videos (theory) | |||
# Quizzes for each section | |||
# Online training videos (equipment operation) | |||
# Group hands-on training | |||
# Individual hands-on training (specific equipment) | |||
<BR> | |||
''The individual hands-on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].'' | |||
<BR> | |||
<BR> | |||
'''Learning objectives''' | |||
<BR> | |||
* Generation and Characteristics of the Etch Plasma | |||
''' | * Introduction to dry etch process | ||
* Tuning of the dry etch process | |||
* Overview of the dry etch equipment at Nanolab | |||
<BR> | |||
''After the course you will be able to'' | |||
* Know why and when to use dry etching | |||
* Use the dry etchers without harming the machines | |||
''' | * Select the right instrument to use for his/her dry etch processing | ||
* | * Select an appropriate etch recipe for his/her dry etch processing | ||
'' | * Spot when the recipe needs to be tuned for his/her needs and | ||
* | * Suggest relevant tuning parameters | ||
<BR> | |||
'''Qualifying Prerequisites''' | |||
<BR> | |||
* Cleanroom safety course at DTU Nanolab | * Cleanroom safety course at DTU Nanolab | ||
* Admission to the cleanroom must be obtained before the training session | * Admission to the cleanroom must be obtained before the group training session | ||
<BR> | |||
'''Course Responsible''' | |||
*Jonas Michael-Lindhard | *Jonas Michael-Lindhard | ||
*Berit Herstrøm | *Berit Herstrøm | ||
<BR> | |||
If you have questions you can contact us | If you have questions you can contact us via [mailto:dryetch@nanolab.dtu.dk dryetch@nanolab.dtu.dk]. | ||
<br clear="all" /> | <br clear="all" /> | ||
<BR> | |||
===Material for preparations and further information=== | ===Material for preparations and further information ''(see also DTU Learn)''=== | ||
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'''<big>Slides from Lecture</big>''' | '''<big>Slides from Lecture</big>''' | ||
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*Lecture slides with explanatory text included [ | --> | ||
*Lecture slides with explanatory text included [https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=7&name=Lecture+Power+point+with+notes+dec+2020.pdf] ''(login required)'' | |||
| style="width: 20%" valign="top"| | | style="width: 20%" valign="top"| | ||
'''<big>Lecture videos </big>'''<br> | '''<big>Lecture videos </big>'''<br> | ||
(Watch before the question and evaluation session)<br> | ''(Watch before the question and evaluation session)''<br> | ||
* The 9 lecture videos can be found on YouTube: [https://www.youtube.com/playlist?list=PLjWVU97LayHBu0XwMGHss5CdEhka6B72U Lecture videos] | |||
'''<big>Pre hands-on training videos </big>'''<br> | '''<big>Pre hands-on training videos </big>'''<br> | ||
(Watch before the hands-on training) | ''(Watch before the hands-on training)'' | ||
* The 13 Hands-on training vidoes can be found on YouTube:[https://www.youtube.com/playlist?list=PLjWVU97LayHC9cl0cuB65m-FlIScBd5t9 Pre hands-on training videos]<br> | |||
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Latest revision as of 23:03, 24 February 2025
The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.
Feedback to this page: click here
Dry Etch Tool Package Training
DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would like to use via training@nanolab.dtu.dk.
The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.
Course Layout
- Online lecture videos (theory)
- Quizzes for each section
- Online training videos (equipment operation)
- Group hands-on training
- Individual hands-on training (specific equipment)
The individual hands-on training can be requested via training@nanolab.dtu.dk.
Learning objectives
- Generation and Characteristics of the Etch Plasma
- Introduction to dry etch process
- Tuning of the dry etch process
- Overview of the dry etch equipment at Nanolab
After the course you will be able to
- Know why and when to use dry etching
- Use the dry etchers without harming the machines
- Select the right instrument to use for his/her dry etch processing
- Select an appropriate etch recipe for his/her dry etch processing
- Spot when the recipe needs to be tuned for his/her needs and
- Suggest relevant tuning parameters
Qualifying Prerequisites
- Cleanroom safety course at DTU Nanolab
- Admission to the cleanroom must be obtained before the group training session
Course Responsible
- Jonas Michael-Lindhard
- Berit Herstrøm
If you have questions you can contact us via dryetch@nanolab.dtu.dk.
Material for preparations and further information (see also DTU Learn)
|
Literature
Slides from Lecture
|
Lecture videos
Pre hands-on training videos
|