LabAdviser/Courses/TPT Thin Film: Difference between revisions

Latest revision as of 20:54, 24 February 2025

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Thin Film Tool Package Training

DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.

The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.

Course Layout

Online lecture videos (theory)
Quizzes for each section
Individual hands-on training (specific equipment)

Individual ands on training can be requested via training@nanolab.dtu.dk.

Learning objectives

Understand different film deposition methods
Learn different thin film formation mechanisms
be aware of relevant materials properties
compare and be able to understand appropriate thin film techniques
introduction to equipment at DTU Nanolab

Course Contents

Introduction to Thin Film Techniques
- Thin Film Formation
- Material Properties
- Overview over Thin Film Techniques
Physical Vapour Deposition (PVD)
- Introduction to PVD
- Resistive thermal evaporation
- E-beam Evaporation
- Sputtering
Thermal Oxidation
Chemical Vapor Deposition (CVD)
Atomic Layer Deposition (ALD)

Qualifying Prerequisites

Cleanroom safety course at DTU Nanolab
Admission to the cleanroom must be obtained before the group training session

Course Responsible

Pernille Voss Larsen
Evgeniy Shkondin

If you have questions you can contact us via thinfilm@nanolab.dtu.dk.

Knowledge and Information about Thin Film Techniques

Introduction to Thin Films

Thermal oxidation

S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation

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 == Thin Film Tool Package Training ==
-DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.
+DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].
 <BR>
 <BR>
@@ Line 51: / Line 51: @@
 * Evgeniy Shkondin
 <BR>
-If you have questions you can contact us via [mailto:thinfilm@nanolab.dtu.dk lithography@nanolab.dtu.dk].
+If you have questions you can contact us via [mailto:thinfilm@nanolab.dtu.dk thinfilm@nanolab.dtu.dk].
 <br clear="all" />
 <BR>
-===Material for preparations ''(see also DTU Learn)''===
-'''Literature:'''
-* [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes]
-==Presentations from the lectures==
+==Knowledge and Information about Thin Film Techniques==
-<big>Slides from the 1<sup>st</sup> lecture</big>
+====Introduction to Thin Films====
-*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f  See LabManager (requires a login)]
-<!--[[Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx]]-->
-<big>Slides from the 2<sup>nd</sup> lecture</big>
-*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f  See LabManager (requires a login)].
-<!--[[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]-->
-==Literature==
-Some literature about thin films can be found here (requires a login):
-====Introduction to thin films====
 *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes]
 *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films]
@@ Line 81: / Line 66: @@
 *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]
-====Stress in thin films====
+====Stress in Thin Films====
 *[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]
-*[https://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/StylusProfilometry/ApplicationNotes/AN516-Thin_Film_Stress_Measurement_Using_Dektak_Stylus_P.pdf Dektak stress measurements]
+*[https://www.bruker.com/en/meta/fileadmin/_jcr_content/root/contentpar/search.download-asset.pdf/2bbdadb5-98f9-4b72-9ad4-cfb3683fb2da/thin-film-stress-measurement-using-dektak-stylus-profilers-app-note-BRUKER.pdf Dektak stress measurements]
+<br clear="all" />
+<BR>