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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Thin_Film click here]'''  
''The contents on this page, including all images and pictures, was created by DTU Nanolab staff unless otherwise stated.''


''This page is written by DTU Nanolab internal''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Thin_Film click here]'''


==Thin Film TPT ==
== Thin Film Tool Package Training ==


DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.  
DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].  
 
<BR>
Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).  
<BR>
 
The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/thin-film-training here].
{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
<BR>
|-
<BR>
 
'''Course Layout'''
|-
# Online lecture videos (theory)
|-style="background:White; color:black; text-align:center"
# Quizzes for each section
!colspan="2"|Thin film tool package training (TPT)
# Individual hands-on training (specific equipment)
|-
<BR>
 
''Individual ands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''
|-
<BR>
!Schedule
<BR>
|
'''Learning objectives''' 
===<b>Theoretical part</b>===
<BR>
 
* Understand different film deposition methods
 
* Learn different thin film formation mechanisms
'''1<sup>st</sup> lecture (2 - 2½ hours):'''
* be aware of relevant materials properties
*Introduction to thin films
* compare and be able to understand appropriate thin film techniques
*Before you start - Material properties to consider
* introduction to equipment at DTU Nanolab
*Overview of thin film techniques at DTU Nanolab
<BR>
*Equipment overview in LabAdviser
'''Course Contents'''
*Thin film techniques – 1<sup>st</sup> part:
<BR>
**Thermal oxidation
* Introduction to Thin Film Techniques
 
** ''Thin Film Formation''
<i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e.
** ''Material Properties''
 
** ''Overview over Thin Film Techniques''
No lecture will be held in August 2023. The next lecture will be held the 6th of September.
* Physical Vapour Deposition (PVD)
 
** ''Introduction to PVD''
If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk.
** ''Resistive thermal evaporation''
 
** ''E-beam Evaporation''
Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
** ''Sputtering''
 
* Thermal Oxidation
<!--The next lecture will be held on the 14th of June 2022 from 10:00 to 12:30.-->  
* Chemical Vapor Deposition (CVD)
 
* Atomic Layer Deposition (ALD)
<!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.-->
<BR>
 
'''Qualifying Prerequisites'''
'''2<sup>nd</sup> lecture (3 - 3½ hours):'''
<BR>
*Thin film techniques – 2<sup>nd</sup>  part:
* Cleanroom safety course at DTU Nanolab
**PVD (physical vapour deposition)
* Admission to the cleanroom must be obtained before the group training session
***E-beam evaporation
<BR>
***Thermal evaporation
'''Course Responsible'''
***Sputtering
* Pernille Voss Larsen
**CVD (chemical vapour depostion)
* Evgeniy Shkondin
***LPCVD (low pressure chemical vapour deposition)
<BR>
***PECVD (plasma enhanced chemical vapour deposition)
If you have questions you can contact us via [mailto:thinfilm@nanolab.dtu.dk thinfilm@nanolab.dtu.dk].
**ALD (atomic layer deposition)
 
<i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf
 
No lecture will be held in August 2023.
 
Two lectures will be held in September: On the 11th of September and on the 27th of September.
 
Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.
 
 
If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk.
 
Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
 
<!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.-->
 
===<b>Practical part</b>===
* None
|-
 
|-
!Location
|
'''Theoretical part'''
 
The locations for the lectures will be notified in the Doodles
 
|-
 
|-
!Qualified prerequisites
|
None
|-
 
|-
!Preparations
|
No preparation is required.
 
However, a good overview of thin film processes can be found in [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes] (requires login).
 
Links to more literature about thin films can be found below.
|-
 
|-
!Course responsible
|
The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
|-
 
|-
!Learning goals
|
*Be aware of relevant material properties for thin films made in the cleanroom
*Understand different thin film techniques
*Compare and be able to select appropriate thin film technique
 
|-
|}
<br clear="all" />
<br clear="all" />
<BR>


==Presentations from the lectures==
==Knowledge and Information about Thin Film Techniques==


<big>Slides from the 1<sup>st</sup> lecture</big>
====Introduction to Thin Films====
*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f  See LabManager (requires a login)]
<!--[[Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx]]-->
 
<big>Slides from the 2<sup>nd</sup> lecture</big>
*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f  See LabManager (requires a login)]. <i>Notice that the presentation is divided into two parts</i>
<!--[[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]-->
 
==Literature==
 
Some literature about thin films can be found here (requires a login):
 
====Introduction to thin films====
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films]
Line 138: Line 66:
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]


====Stress in thin films====
====Stress in Thin Films====
*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]
*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]
*[https://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/StylusProfilometry/ApplicationNotes/AN516-Thin_Film_Stress_Measurement_Using_Dektak_Stylus_P.pdf Dektak stress measurements]
*[https://www.bruker.com/en/meta/fileadmin/_jcr_content/root/contentpar/search.download-asset.pdf/2bbdadb5-98f9-4b72-9ad4-cfb3683fb2da/thin-film-stress-measurement-using-dektak-stylus-profilers-app-note-BRUKER.pdf Dektak stress measurements]
<br clear="all" />
<BR>

Latest revision as of 20:54, 24 February 2025

The contents on this page, including all images and pictures, was created by DTU Nanolab staff unless otherwise stated.

Feedback to this page: click here

Thin Film Tool Package Training

DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.

The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.

Course Layout

  1. Online lecture videos (theory)
  2. Quizzes for each section
  3. Individual hands-on training (specific equipment)


Individual ands on training can be requested via training@nanolab.dtu.dk.

Learning objectives

  • Understand different film deposition methods
  • Learn different thin film formation mechanisms
  • be aware of relevant materials properties
  • compare and be able to understand appropriate thin film techniques
  • introduction to equipment at DTU Nanolab


Course Contents

  • Introduction to Thin Film Techniques
    • Thin Film Formation
    • Material Properties
    • Overview over Thin Film Techniques
  • Physical Vapour Deposition (PVD)
    • Introduction to PVD
    • Resistive thermal evaporation
    • E-beam Evaporation
    • Sputtering
  • Thermal Oxidation
  • Chemical Vapor Deposition (CVD)
  • Atomic Layer Deposition (ALD)


Qualifying Prerequisites

  • Cleanroom safety course at DTU Nanolab
  • Admission to the cleanroom must be obtained before the group training session


Course Responsible

  • Pernille Voss Larsen
  • Evgeniy Shkondin


If you have questions you can contact us via thinfilm@nanolab.dtu.dk.

Knowledge and Information about Thin Film Techniques

Introduction to Thin Films

Thermal oxidation

Stress in Thin Films



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