LabAdviser/Courses/TPT Thin Film: Difference between revisions

Latest revision as of 19:54, 24 February 2025

The contents on this page, including all images and pictures, was created by DTU Nanolab staff unless otherwise stated.

Feedback to this page: click here

Thin Film Tool Package Training

DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.

The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.

Course Layout

Online lecture videos (theory)
Quizzes for each section
Individual hands-on training (specific equipment)

Individual ands on training can be requested via training@nanolab.dtu.dk.

Learning objectives

Understand different film deposition methods
Learn different thin film formation mechanisms
be aware of relevant materials properties
compare and be able to understand appropriate thin film techniques
introduction to equipment at DTU Nanolab

Course Contents

Introduction to Thin Film Techniques
- Thin Film Formation
- Material Properties
- Overview over Thin Film Techniques
Physical Vapour Deposition (PVD)
- Introduction to PVD
- Resistive thermal evaporation
- E-beam Evaporation
- Sputtering
Thermal Oxidation
Chemical Vapor Deposition (CVD)
Atomic Layer Deposition (ALD)

Qualifying Prerequisites

Cleanroom safety course at DTU Nanolab
Admission to the cleanroom must be obtained before the group training session

Course Responsible

Pernille Voss Larsen
Evgeniy Shkondin

If you have questions you can contact us via thinfilm@nanolab.dtu.dk.

Knowledge and Information about Thin Film Techniques

Introduction to Thin Films

Thermal oxidation

S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation

@@ Line 1: / Line 1: @@
-'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Thin_Film click here]'''
+''The contents on this page, including all images and pictures, was created by DTU Nanolab staff unless otherwise stated.''
-==Thin Film TPT ==
+'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Thin_Film click here]'''
-DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.
+== Thin Film Tool Package Training ==
-Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).
+DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].
+<BR>
-{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
+<BR>
-|-
+The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/thin-film-training here].
+<BR>
-|-
+<BR>
-|-style="background:White; color:black; text-align:center"
+'''Course Layout'''
-!colspan="2"|Thin film tool package training (TPT)
+# Online lecture videos (theory)
-|-
+# Quizzes for each section
+# Individual hands-on training (specific equipment)
-|-
+<BR>
-!Schedule
+''Individual ands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''
-|
+<BR>
-<b>Theoretical part</b>
+<BR>
+'''Learning objectives'''
-'''1<sup>st</sup> lecture (2 hours):'''
+<BR>
-*An introduction to thin films
+* Understand different film deposition methods
-*Material properties
+* Learn different thin film formation mechanisms
-*Overview of different thin film techniques at DTU Nanolab – 1<sup>st</sup> part:
+* be aware of relevant materials properties
-**Thermal oxidation
+* compare and be able to understand appropriate thin film techniques
-**Electroplating
+* introduction to equipment at DTU Nanolab
+<BR>
-<i>Sign up for the next lecture here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e.
+'''Course Contents'''
+<BR>
-The next lecture will be held online (using Zoom) on the 28th of June from 10.00 to 12.30</i>
+* Introduction to Thin Film Techniques
-<!-- The date will come after the summer vaction-->
+** ''Thin Film Formation''
+** ''Material Properties''
-'''2<sup>nd</sup> lecture (3 hours):'''
+** ''Overview over Thin Film Techniques''
-*Vacuum basics
+* Physical Vapour Deposition (PVD)
-*Overview of different thin film techniques at DTU Nanolab – 2<sup>nd</sup>  part:
+** ''Introduction to PVD''
-*PVD (physical vapour deposition)
+** ''Resistive thermal evaporation''
-**E-beam evaporation
+** ''E-beam Evaporation''
-**Thermal evaporation
+** ''Sputtering''
-**Sputtering
+* Thermal Oxidation
-*CVD (chemical vapour depostion)
+* Chemical Vapor Deposition (CVD)
-**LPCVD (low pressure chemical vapour deposition)
+* Atomic Layer Deposition (ALD)
-**PECVD (plasma enhanced chemical vapour deposition)
+<BR>
-*ALD (atomic layer deposition)
+'''Qualifying Prerequisites'''
+<BR>
-<i>Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf
+* Cleanroom safety course at DTU Nanolab
+* Admission to the cleanroom must be obtained before the group training session
-The next lecture will be held online (using Zoom) on the 4th of June from 9.00 to 12.30 </i>
+<BR>
-<!--The date will come after the summer vaction</i>-->
+'''Course Responsible'''
+* Pernille Voss Larsen
+* Evgeniy Shkondin
+<BR>
+If you have questions you can contact us via [mailto:thinfilm@nanolab.dtu.dk thinfilm@nanolab.dtu.dk].
+<br clear="all" />
+<BR>
-<b>Practical part</b>
+==Knowledge and Information about Thin Film Techniques==
-* None
-|-
-|-
+====Introduction to Thin Films====
-!Location
+*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes]
-|
+*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films]
-'''Theoretical part'''
+*[https://www.sciencedirect.com/science/article/pii/B9780815520375000101 D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties]
-* The location of the lectures will be notified in the doodles
+*[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf  K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films]
-|-
+====Thermal oxidation====
+*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]
-|-
+====Stress in Thin Films====
-!Qualified prerequisites
+*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]
-|
+*[https://www.bruker.com/en/meta/fileadmin/_jcr_content/root/contentpar/search.download-asset.pdf/2bbdadb5-98f9-4b72-9ad4-cfb3683fb2da/thin-film-stress-measurement-using-dektak-stylus-profilers-app-note-BRUKER.pdf Dektak stress measurements]
-* None
-|-
-|-
-!Preparations
-|
-* Read [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes] (Available online from DTU campus).
-|-
-|-
-!Course responsible
-|
-*The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
-|-
-|-
-!Learning goals
-|
-*Be aware of relevant material properties for thin films made in the cleanroom
-*Understand importance of correct process pressure (for vacuum processes)
-*Understand different thin film techniques
-*Compare and be able to select appropriate thin film technique
-|-
-|}
 <br clear="all" />
+<BR>
-===Material for preparations and further information===
-====Slides from the lectures====
-<big>Slides from lecture 1</big>
-*Lecture slide show [[Media:1_DTU_Nanolab_Thin_Film_TPT_final_May_2020.pptx‎]]
-<big>Slides from lecture 2</big>
-*Lecture slide show [[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May_2020.pptx]]
-====Literature====
-*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf  Franssila, 2010, Chapter 5: Thin-Film Materials and Processes]
-*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf  Franssila, 2010, Chapter 7: Advanced Thin films]
-*[https://www.sciencedirect.com/science/article/pii/B9780815520375000101 D. M. Mattox, Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10:Atomistic Film Growth and Some Growth-Related Film Properties]
-*[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf  K. Oura et al., 2003, Surface Science, Chapter 14: Growth of Thin Films]