Specific Process Knowledge/Pattern Design/Travka: Difference between revisions
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[[Category: Equipment |Etch DRIE]] | |||
[[Category: Etch (Dry) Equipment|DRIE]] | |||
<!--Checked for updates on 2/10-2020 - ok/jmli --> | |||
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== The Travka mask set == | == The Travka mask set == | ||
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|+ '''Field distribution''' | |+ '''Field distribution''' | ||
|- | |- | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
|- | |- | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center" | | style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| A-square | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center" | | style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| A-square | ||
| style="background:green; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/deskew| Deskew]] | | style="background:green; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/deskew| Deskew]] | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
|- | |- | ||
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | | style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | ||
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | | style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | | style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | ||
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | | style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | ||
|- | |- | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
|- | |- | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
|- | |- | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
|- | |- | ||
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | | style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | ||
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | | style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | | style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]] | ||
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | | style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]] | ||
|- | |- | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:green; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/deskew| Deskew]] | | style="background:green; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/deskew| Deskew]] | ||
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center" | | style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| A-square | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center" | | style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| ASE | ||
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center" | | style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| Filmtek | ||
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center" | | style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| A-square | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
|- | |- | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center" | | style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| Dektak | ||
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| | | style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| PilCav | ||
| style="background:red; color:black" width="50" height="50" color align="center" valign="center" | | style="background:red; color:black" width="50" height="50" color align="center" valign="center"| A-circle | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center" | | style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| Dummy | ||
|- | |- | ||
|} | |} | ||