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Specific Process Knowledge/Thin film deposition/Deposition of Carbon: Difference between revisions

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*[[/Deposition of C in Sputter-System Lesker|Deposition of Carbon in Sputter-System (Lesker)]]
*[[/Deposition of C in Sputter-System Lesker|Deposition of Carbon in Sputter-System (Lesker)]]
In order to deposit carbon, all other parts of the chamber will be covered with Al foil to prevent cross-contamination.