Specific Process Knowledge/Wafer and sample drying/Spin Dryers: Difference between revisions
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'''The user manual, technical information, and contact information can be found in LabManager: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach= | '''The user manual, technical information, and contact information can be found in LabManager: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=157 Spin dryer 2] [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=158 Spin dryer 3] [https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=408 Spin dryer 5][https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=323 Spindryer 6 (8")]''' | ||
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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | ||
|style="background:WhiteSmoke; color:black"|<b>Spin dryer 2</b> | |style="background:WhiteSmoke; color:black"|<b>Spin dryer 2</b> | ||
|style="background:WhiteSmoke; color:black"|<b>Spin dryer 3</b> | |style="background:WhiteSmoke; color:black"|<b>Spin dryer 3</b> | ||
|style="background:WhiteSmoke; color:black"|<b>Spin dryer 5</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Spin dryer 6</b> | |||
|- | |- | ||
!style="background:silver; color:black;" align="center" width="60"|Location | !style="background:silver; color:black;" align="center" width="60"|Location | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *B-1 | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *D-3 | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*D-3 | *D-3 | ||
|style="background:WhiteSmoke; color:black"| | |||
*F-3 | |||
|- | |- | ||
!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60"|Purpose | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
|style="background:WhiteSmoke; color:black"| | |||
*Drying | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Drying | *Drying | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*1-25 100 mm wafers | *1-25 100 mm wafers | ||
*1-25 150 mm wafers | |||
|style="background:WhiteSmoke; color:black"| | |||
*1-25 100 mm wafers | |||
*1-25 150 mm wafers | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*1-25 100 mm wafers | *1-25 100 mm wafers | ||
*1-25 150 mm wafers | *1-25 150 mm wafers | ||
*1-25 200 mm wafers | |||
|- | |- | ||
| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
|style="background:WhiteSmoke; color:black"| | |||
*Only for RCA cleaned wafers | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*No restrictions | *No restrictions | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *No restrictions | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*No restrictions | *No restrictions | ||
|- | |- | ||
|} | |} | ||