Specific Process Knowledge/Etch/DRIE-Pegasus/Notation: Difference between revisions
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== How to read the notation on process recipes == | == How to read the notation on process recipes == | ||
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| Common | | Common | ||
| colspan="4" | Temperature 20 degs, HBC 10 torr | | colspan="4" | Temperature 20 degs, HBC 10 torr | ||
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