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Specific Process Knowledge/Etch/Wet Titanium Etch: Difference between revisions

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'''Feedback to this page''': '''[mailto:wetchemistry@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Titanium_Etch click here]'''
'''Feedback to this page''': '''[mailto:wetchemistry@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Titanium_Etch click here]'''
 
'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''
 
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'''All measurements on this page has been made by Nanolab staff.'''  


[[Category: Equipment|Etch Wet Titanium]]
[[Category: Equipment|Etch Wet Titanium]]
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==Wet etching of Titanium==
==Wet etching of Titanium==
[[Image:Stinkskab RR2.jpg|250x250px|thumb|Fumehood(RCA) in cleanroom B-1. <br />Wet etching of titanium can be done in the "HF5%/BHF-dirty" bath in this fume hood]]
[[Image:Fumehood1-2.jpg|300x300px|thumb|Fume hood 01 and 02 in Cleanroom D-3 for working with acids and bases.<br>Wet etching of titanium can be done in beakers with BHF or RCA1 mix in a beaker in one of these fume hoods]]
[[Image:Fumehood1-2.jpg|300x300px|thumb|Fume hood 1 and 2 for acids and bases in cleanroom D-3. <br />Wet etching of titanium can also be done in beakers with BHF or RCA1 mix in a beaker in one of these fume hoods]]


We have two solutions for wet titanium etching:
We have two solutions for wet titanium etching:
    
    
# BHF (wetbench or fumehood)
# BHF (beaker in fumehood)
# Cold RCA1 (fumehood)
# Cold RCA1 (beaker in fumehood)
<br>
<br>
Etching titanium in BHF can take place in the 'HF5%/BHF-dirty' bath inside Fumehood(RCA) in cleanroom B-1. This is the only pre-made BHF bath where metals are allowed. You can also do the titanium etch in BHF or RCA1 mix by making your own solution in a beaker in Fumehood 01 or 02 in cleanroom D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here].
Etching titanium in BHF or RCA1 mix is made by making your own solution in a beaker in either Fumehood 01 or 02 in Cleanroom D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here].




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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Chemical solution'''
|'''Chemical solution'''
|HF:NH<sub>4</sub>F
|HF : NH<sub>4</sub>F : NH<sub>4</sub>HF<sub>2</sub>
|NH<sub>3</sub>OH:H<sub>2</sub>O<sub>2</sub>:H<sub>2</sub>O - 1:1:5
|H<sub>2</sub>O : NH<sub>4</sub>OH : H<sub>2</sub>O<sub>2</sub> - 5:1:1
|-
|-


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Not known (it bubbles while etching)
Not known (it bubbles while etching)
|
|
Not known
50 nm etches in around 2 min
|-
|-


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!Allowed materials
!Allowed materials
|
|
Practically no restrictions when used in beaker or 'HF5%/BHF-dirty' bath in Fumehood(RCA) in cleanroom B-1.  
Practically no restrictions when used in beaker. Make sure to use a plastic beaker, since glass will be attacked by BHF/HF.  
Make a note on the beaker of which materials have been processed.  
Make a note on the beaker of which materials have been processed.  
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|
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