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'''Feedback to this page''': '''[mailto:photolith@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Resist click here]'''
{{cc-nanolab}}


'''This section is under construction [[Image:section under construction.jpg|70px]]'''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Resist click here]'''


[[Category: Equipment |Resist]]
[[Category: Lithography|Resist]]
[[Category: Lithography|Resist]]
{{:Specific Process Knowledge/Lithography/Resist/UserBottles}}


=UV Resist=
=UV Resist=
Standard UV sensitive resists available at DTU Nanolab:
*[[Specific_Process_Knowledge/Lithography/5214E|AZ 5214E]]
*[[Specific_Process_Knowledge/Lithography/MiR|AZ MiR 701]]
*[[Specific_Process_Knowledge/Lithography/nLOF|AZ nLOF 2020]]
*[[Specific_Process_Knowledge/Lithography/4562|AZ 4562]]
*[[Specific_Process_Knowledge/Lithography/SU-8|SU-8]] (2005, 2035, and 2075)
*[[Specific_Process_Knowledge/Lithography/TIspray|TI Spray]]
{{:Specific Process Knowledge/Lithography/Resist/UVresist}}
{{:Specific Process Knowledge/Lithography/Resist/UVresist}}


=DUV Resist=
=DUV Resist=
#section-h:Specific Process Knowledge/Lithography/DUVStepperLithography#Process_information_2}}
{{:Specific Process Knowledge/Lithography/Resist/DUVresist}}


=E-beam Resist=
=E-beam Resist=
{{:Specific Process Knowledge/Lithography/Resist/Ebeamresist}}


=Imprint Resist=
=Imprint Resist=
{{:Specific Process Knowledge/Lithography/Resist/NILresist}}
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