Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace/Acceptance test: Difference between revisions
Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing/Acceptance_test click here]''' ''This page is written by DTU Nanolab internal'' ==Multipurpose Anneal furnace acceptance test== The acceptance for the Multipurpose Anneal furnace was performed in November 2014 by ATV Technologie and DTU Nanolab. At..." |
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''This page is written by DTU Nanolab internal'' | ''This page is written by DTU Nanolab internal'' | ||
==Multipurpose Anneal furnace acceptance test== | ==Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test== | ||
The acceptance for the Multipurpose Anneal furnace was performed in November 2014 by ATV Technologie and DTU Nanolab. | The acceptance for the Resist Pyrolysis (former Multipurpose Anneal) furnace was performed in November 2014 by ATV Technologie and DTU Nanolab. | ||
At the acceptance test a dry oxide layer was grown on a boat of 150 mm wafers. The oxide growth was repeated three times | At the acceptance test a dry oxide layer was grown on a boat of 150 mm wafers. The oxide growth was repeated three times | ||