Specific Process Knowledge/Characterization/XPS/Processing: Difference between revisions
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= XPS Data processing with Avantage = | |||
== How to analyze data== | |||
In this section, all steps (import data, add peaks and backgrounds etc.) of the analysis are described. | |||
=== XPS Simplified === | |||
The web page [https://xpssimplified.com/index.php XPS Simplified] is a ThermoScientific page where you can find a lot of information about the techniques, the hardware, data analysis etc. | |||
=== XPS Knowledge View === | |||
*[[Specific Process Knowledge/Characterization/XPS/Processing/ | A knowledge database providing specific information on every element is included in the software. It provides very useful information about the XPS characteristics of every detectable element and it may even be a very good idea to consult it before the data is acquired. Click [[Specific Process Knowledge/Characterization/XPS/Processing/XPSknowledgeview|'''HERE''']] to get information on how to access XPS Knowledge View in Avantage. | ||
=== Basic instructions === | |||
Click [[Specific Process Knowledge/Characterization/XPS/Processing/Basics|'''HERE''']] to have a complete walk-through of an example. This includes | |||
* Open data file | |||
* Open and analyze survey spectrum | |||
* Analyze high resolution spectra of the individual spectra: | |||
** Add background | |||
** Add peaks | |||
** Quantify | |||
* Analyze depth profiles | |||
=== Guidelines on data processing === | |||
Click [[Specific Process Knowledge/Characterization/XPS/Processing/Guidelines|'''HERE''']] to see some general guidelines on data processing in Avantage. | |||
== Introduction to data analysis with Avantage by Thermofisher == | |||
In the Youtube video below, the application specialist from Thermorfisher Paul Mack walks you through Avantage...somewhat slowly.. | |||
[https://www.youtube.com/watch?v=gVzYThRKjYQ '''Click here '''] | |||
== Examples of data analysis == | |||
*[[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1|Depth profile of ALD layers: Silicon wafer with 15 nm Al<sub>2</sub>O<sub>3</sub>, 15 nm of TiO<sub>2</sub> and 16 nm of HfO<sub>2</sub> ]] | |||
*[[Specific_Process_Knowledge/Characterization/XPS/XPS_Depth_profiling|Depth profile of a silicon wafer with nitride, polysilicon and oxide layer]] | |||
== Periodic table with binding energies of all elements== | |||
*[[Specific Process Knowledge/Characterization/XPS/Processing/PeriodicTable]] | |||
= XPS data analysis with CasaXPS = | |||
CasaXPS has its own [https://www.youtube.com/channel/UCUqLBeW-UAjXC55HbRYOabQ Youtube channel] with more than 250 videos so it would be a complete waste of time to make any instructions here. Instead, this is where you as a CasaXPS user could contribute to this database: In case you found any Youtube video that was particularly good, please notify us and we will post a link. | |||
In order to use CasaXPS, you will need to export the data from Avantage and convert it into the Vamas format. Click [[Specific Process Knowledge/Characterization/XPS/Export2CasaXPS | ''this link'']] to find more information. | |||
Latest revision as of 13:15, 30 October 2023
Feedback to this page: click here
Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab
XPS Data processing with Avantage
How to analyze data
In this section, all steps (import data, add peaks and backgrounds etc.) of the analysis are described.
XPS Simplified
The web page XPS Simplified is a ThermoScientific page where you can find a lot of information about the techniques, the hardware, data analysis etc.
XPS Knowledge View
A knowledge database providing specific information on every element is included in the software. It provides very useful information about the XPS characteristics of every detectable element and it may even be a very good idea to consult it before the data is acquired. Click HERE to get information on how to access XPS Knowledge View in Avantage.
Basic instructions
Click HERE to have a complete walk-through of an example. This includes
- Open data file
- Open and analyze survey spectrum
- Analyze high resolution spectra of the individual spectra:
- Add background
- Add peaks
- Quantify
- Analyze depth profiles
Guidelines on data processing
Click HERE to see some general guidelines on data processing in Avantage.
Introduction to data analysis with Avantage by Thermofisher
In the Youtube video below, the application specialist from Thermorfisher Paul Mack walks you through Avantage...somewhat slowly..
Examples of data analysis
Periodic table with binding energies of all elements
XPS data analysis with CasaXPS
CasaXPS has its own Youtube channel with more than 250 videos so it would be a complete waste of time to make any instructions here. Instead, this is where you as a CasaXPS user could contribute to this database: In case you found any Youtube video that was particularly good, please notify us and we will post a link.
In order to use CasaXPS, you will need to export the data from Avantage and convert it into the Vamas format. Click this link to find more information.