Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions

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The first solution is always available ready made in the Aluminium Etch bath. The second solution can be mixed manually or bought pre-mixed and ready for use. Please contact DTU Nanolab if you need to use the Aluminum etch 80-15-3-2 etch mixture. Since it is used only very rarely it will probably have to be ordered when needed. The table below summarizes possibilities and parameter for the two etch mixtures.

!Location

|Bath inside Wet Bench 05 in D-3

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!Batch size

|1-25 wafers at a time

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|4" wafers

6" wafers

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See the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=381 Cross Contamination Sheet] for Aluminium Etch bath

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