Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions
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Latest revision as of 12:30, 28 June 2023
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| Recipe | Step | Temperature | Pressure | C4F8 | SF6 | O2 | Ar | Coil | Platen | Runs | Key words |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Mediumiso1 | - | 20 | 25 | 0 | 150 | 0 | 0 | 600 | 3 | 1 | Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen |
| Isoslow7 | - | 10 | 10 | 0 | 80 | 0 | 0 | 150 | 3 | 1 | |
| - |