Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/Isotropic click here]''' | |||
<!--Checked for updates on 2/10-2020 - ok/jmli --> | |||
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{| border="1" cellpadding="1" cellspacing="0" style="text-align:center;" | {| border="1" cellpadding="1" cellspacing="0" style="text-align:center;" | ||
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! width="100" | Key words | ! width="100" | Key words | ||
|- | |- | ||
! | ! Mediumiso1 <!-- recipe name --> | ||
| - <!-- step --> | | - <!-- step --> | ||
| 20 <!-- chiller temp --> | | 20 <!-- chiller temp --> | ||
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| 3 <!-- platen power --> | | 3 <!-- platen power --> | ||
|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1|1]] <!-- link processes --> | |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1|1]] <!-- link processes --> | ||
| | | Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen <!-- keywords --> | ||
|- | |- | ||
! Isoslow7 <!-- recipe name --> | ! Isoslow7 <!-- recipe name --> | ||
Latest revision as of 12:30, 28 June 2023
Feedback to this page: click here
| Recipe | Step | Temperature | Pressure | C4F8 | SF6 | O2 | Ar | Coil | Platen | Runs | Key words |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Mediumiso1 | - | 20 | 25 | 0 | 150 | 0 | 0 | 600 | 3 | 1 | Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen |
| Isoslow7 | - | 10 | 10 | 0 | 80 | 0 | 0 | 150 | 3 | 1 | |
| - |