Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions

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{| border="1" cellpadding="1" cellspacing="0" style="text-align:center;"
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/Isotropic click here]'''
|+ '''Mediumiso'''
<!--Checked for updates on 2/10-2020 - ok/jmli -->
|-
! rowspan="2" width="100"| Recipe
! rowspan="2" width="20"| Step
! rowspan="2" width="20"| Temp.
! colspan="6" | Deposition step
! colspan="7" | Etch step
! colspan="3" | Process observations
|-
! Time
! Pres.
! C<sub>4</sub>F<sub>8</sub>
! SF<sub>6</sub>
! O<sub>2</sub>
! Coil
! Time
! Pres.
! C<sub>4</sub>F<sub>8</sub>
! SF<sub>6</sub>
! O<sub>2</sub>
! Coil
| [[Main Page/Process Logs/jmli/Parameters#Platen power|Platen]]  
| [[Main Page/Process Logs/jmli/Parameters#Hardware | HW]]
! Runs
! width="100" | Key words
|-
! mediumiso1    <!-- recipe name -->
| -      <!-- step -->
| 20      <!-- chiller temp -->
| NA      <!-- dep time -->
| NA      <!-- dep pressure -->
| NA      <!-- C4F8 flow -->
| NA      <!-- SF6 flow -->
| NA    <!-- O2 flow -->
| NA      <!-- coil power -->
| NA      <!-- etch time -->
| 25      <!-- etch pressure -->
| 0      <!-- C4F8 flow -->
| 150      <!-- SF6 flow -->
| 0      <!-- O2 flow -->
| 600      <!-- coil power -->
| 3      <!-- platen power -->
| -       <!-- hardware setting -->
| [[Main Page/Process Logs/jmli/Pegasus/isotropic/mediumiso1 | 1]]      <!-- link processes -->
| NA    <!-- keywords -->
|-
! -  <!-- recipe name -->
|        <!-- step -->
|        <!-- chiller temp -->
|        <!-- dep time -->
|        <!-- dep pressure -->
|        <!-- C4F8 flow -->
|        <!-- SF6 flow -->
|        <!-- O2 flow -->
|        <!-- coil power -->
|        <!-- etch time -->
|        <!-- etch pressure -->
|        <!-- C4F8 flow -->
|        <!-- SF6 flow -->
|        <!-- O2 flow -->
|        <!-- coil power -->
|        <!-- platen power -->
|        <!-- hardware setting -->
|      <!-- link processes -->
|      <!-- keywords -->
|-
|}
 
 
 
 
 
 
 




<!--Checked for updates on 14/5-2018 - ok/jmli -->


{| border="1" cellpadding="1" cellspacing="0" style="text-align:center;"
{| border="1" cellpadding="1" cellspacing="0" style="text-align:center;"
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! width="50"| Step
! width="50"| Step
! width="50"| Temperature
! width="50"| Temperature
! width="50"| Time
! width="50"| Pressure
! width="50"| Pressure
! width="50"| C<sub>4</sub>F<sub>8</sub>
! width="50"| C<sub>4</sub>F<sub>8</sub>
Line 91: Line 18:
! width="50"| Coil  
! width="50"| Coil  
! width="50"| Platen
! width="50"| Platen
! colspan="2" | Process observations
! width="50"| Runs
|-
! Runs
! width="100" | Key words
! width="100" | Key words
|-
|-
! mediumiso1   <!-- recipe name -->
! Mediumiso1   <!-- recipe name -->
| -        <!-- step -->
| -        <!-- step -->
| 20      <!-- chiller temp -->
| 20      <!-- chiller temp -->
| NA      <!-- time -->
| 25      <!-- pressure -->
| 25      <!-- pressure -->
| 0        <!-- C4F8 flow -->
| 0        <!-- C4F8 flow -->
| 150      <!-- SF6 flow -->
| 150      <!-- SF6 flow -->
| 0        <!-- O2 flow -->
| 0        <!-- O2 flow -->
| 0        <!-- Ar flow -->
| 600      <!-- coil power -->
| 600      <!-- coil power -->
| 3      <!-- platen power -->
| 3      <!-- platen power -->
| [[Main Page/Process Logs/jmli/Pegasus/isotropic/mediumiso1 | 1]]       <!-- link processes -->
|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1|1]]     <!-- link processes -->
| NA     <!-- keywords -->
| Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen     <!-- keywords -->
|-
|-
!        <!-- recipe name -->
! Isoslow7      <!-- recipe name -->
| -      <!-- step -->
| 10       <!-- chiller temp -->
| 10      <!-- pressure -->
| 0      <!-- C4F8 flow -->
| 80      <!-- SF6 flow -->
| 0      <!-- O2 flow -->
| 0      <!-- Ar flow -->
| 150      <!-- coil power -->
| 3      <!-- platen power -->
|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/Isoslow7|1]]        <!-- link processes -->
|        <!-- keywords -->
|-
! -      <!-- recipe name -->
|        <!-- step -->
|        <!-- step -->
|        <!-- chiller temp -->
|        <!-- chiller temp -->
|        <!-- time -->
|        <!-- pressure -->
|        <!-- pressure -->
|        <!-- C4F8 flow -->
|        <!-- C4F8 flow -->
|        <!-- SF6 flow -->
|        <!-- SF6 flow -->
|        <!-- O2 flow -->
|        <!-- O2 flow -->
|      <!-- Ar flow -->
|        <!-- coil power -->
|        <!-- coil power -->
|        <!-- platen power -->
|        <!-- platen power -->
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|        <!-- keywords -->
|        <!-- keywords -->
|-
|-
|}
|}

Latest revision as of 12:30, 28 June 2023

Feedback to this page: click here


Mediumiso
Recipe Step Temperature Pressure C4F8 SF6 O2 Ar Coil Platen Runs Key words
Mediumiso1 - 20 25 0 150 0 0 600 3 1 Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen
Isoslow7 - 10 10 0 80 0 0 150 3 1
-
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