Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions

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(Created page with "{| border="1" cellpadding="1" cellspacing="0" style="text-align:center;" |+ '''Mediumiso''' |- ! rowspan="2" width="100"| Recipe ! rowspan="2" width="20"| Step ! rowspan="2" w...")
 
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/Isotropic click here]'''
<!--Checked for updates on 2/10-2020 - ok/jmli -->
<!--Checked for updates on 14/5-2018 - ok/jmli -->
{| border="1" cellpadding="1" cellspacing="0" style="text-align:center;"
{| border="1" cellpadding="1" cellspacing="0" style="text-align:center;"
|+ '''Mediumiso'''
|+ '''Mediumiso'''
|-
|-
! rowspan="2" width="100"| Recipe
! width="50"| Recipe
! rowspan="2" width="20"| Step
! width="50"| Step
! rowspan="2" width="20"| Temp.
! width="50"| Temperature
! colspan="6" | Deposition step
! width="50"| Pressure
! colspan="7" | Etch step
! width="50"| C<sub>4</sub>F<sub>8</sub>
! colspan="3" | Process observations
! width="50"| SF<sub>6</sub>
|-
! width="50"| O<sub>2</sub>
! Time
! width="50"| Ar
! Pres.
! width="50"| Coil
! C<sub>4</sub>F<sub>8</sub>
! width="50"| Platen
! SF<sub>6</sub>
! width="50"| Runs
! O<sub>2</sub>
! Coil
! Time
! Pres.
! C<sub>4</sub>F<sub>8</sub>
! SF<sub>6</sub>
! O<sub>2</sub>
! Coil
| [[Main Page/Process Logs/jmli/Parameters#Platen power|Platen]]
| [[Main Page/Process Logs/jmli/Parameters#Hardware | HW]]
! Runs
! width="100" | Key words
! width="100" | Key words
|-
|-
! mediumiso1   <!-- recipe name -->
! Mediumiso1   <!-- recipe name -->
| -       <!-- step -->
| -       <!-- step -->
| 20      <!-- chiller temp -->
| 20      <!-- chiller temp -->
| NA       <!-- dep time -->
| 25       <!-- pressure -->
| NA      <!-- dep pressure -->
| 0        <!-- C4F8 flow -->
| NA      <!-- C4F8 flow -->
| 150     <!-- SF6 flow -->
| NA     <!-- SF6 flow -->
| 0        <!-- O2 flow -->
| NA    <!-- O2 flow -->
| 0       <!-- Ar flow -->
| NA      <!-- coil power -->
| NA      <!-- etch time -->
| 25      <!-- etch pressure -->
| 0       <!-- C4F8 flow -->
| 150      <!-- SF6 flow -->
| 0      <!-- O2 flow -->
| 600      <!-- coil power -->
| 600      <!-- coil power -->
| 3      <!-- platen power -->
| 3      <!-- platen power -->
| -      <!-- hardware setting -->
|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1|1]]    <!-- link processes -->
| [[Main Page/Process Logs/jmli/Pegasus/isotropic/mediumiso1 | 1]]       <!-- link processes -->
|  Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen    <!-- keywords -->
| NA    <!-- keywords -->
|-
! Isoslow7       <!-- recipe name -->
| -      <!-- step -->
| 10        <!-- chiller temp -->
| 10      <!-- pressure -->
| 0      <!-- C4F8 flow -->
| 80      <!-- SF6 flow -->
| 0      <!-- O2 flow -->
| 0      <!-- Ar flow -->
| 150      <!-- coil power -->
| 3      <!-- platen power -->
|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/Isoslow7|1]]         <!-- link processes -->
|       <!-- keywords -->
|-
|-
! -   <!-- recipe name -->
! -       <!-- recipe name -->
|        <!-- step -->
|        <!-- step -->
|        <!-- chiller temp -->
|        <!-- chiller temp -->
|        <!-- dep time -->
|        <!-- pressure -->
|        <!-- dep pressure -->
|        <!-- C4F8 flow -->
|        <!-- SF6 flow -->
|        <!-- O2 flow -->
|        <!-- coil power -->
|        <!-- etch time -->
|        <!-- etch pressure -->
|        <!-- C4F8 flow -->
|        <!-- C4F8 flow -->
|        <!-- SF6 flow -->
|        <!-- SF6 flow -->
|        <!-- O2 flow -->
|        <!-- O2 flow -->
|      <!-- Ar flow -->
|        <!-- coil power -->
|        <!-- coil power -->
|        <!-- platen power -->
|        <!-- platen power -->
|        <!-- hardware setting -->
|        <!-- link processes -->
|      <!-- link processes -->
|       <!-- keywords -->
|     <!-- keywords -->
|-
|-
|}
|}

Latest revision as of 12:30, 28 June 2023

Feedback to this page: click here


Mediumiso
Recipe Step Temperature Pressure C4F8 SF6 O2 Ar Coil Platen Runs Key words
Mediumiso1 - 20 25 0 150 0 0 600 3 1 Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen
Isoslow7 - 10 10 0 80 0 0 150 3 1
-
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