Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation/Pathlist: Difference between revisions
Created page with ";;*** Mask Exposure Peformance Test *** MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE CYCLIC CURRNT,DRIFT CYCLE 5M MASK01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE CYCLIC CURRNT,DRIFT CYCLE 5M ;;*** Direct Exposure Peformance Test *** DIRE00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE CYCLIC CURRNT CYCLE 5M DIRE01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE CYCLIC CURR..." |
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=Path list= | |||
This is the full path list as available on the JEOL 9500 system. Please contact the EBL staff if you need a custom path defined on the tool. <div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Users are NOT allowed to change the path definition file on the system.'''</div> | |||
INITIAL signifies subprograms carried out prior to pattern writing. CYCLIC determines subprograms carried out at the set interval during pattern writing. The first cycle is carried out right after INITIAL and hence before pattern writing. CYCLE defines the time between cyclic calibration, unit is minutes. The is two different behaviours toggled with the field '''F''' switch. Without the '''F''' switch cyclic calibration is only performed after pattern writing of the current chip is completed. If the pattern is a full wafer, i.e. defined as a (1,1) array in the JDF, no cyclic calibration will be done during pattern writing. With the '''F''' switch cyclic calibration will start at the end of the current writing field after the designated interval has passed. | |||
<pre> | |||
;;*** Mask Exposure Peformance Test *** | ;;*** Mask Exposure Peformance Test *** | ||
MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | ||
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TEST07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
TEST08: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST08: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
TEST09: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | TEST09: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
TEST10: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | TEST10: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
TEST11: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST11: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M, F | CYCLE 5M, F | ||
TEST12: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST12: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M, F | CYCLE 5M, F | ||
TEST13: INITIAL INITAE,INITBE,CURRNT,PDEFBE | TEST13: INITIAL INITAE,INITBE,CURRNT,PDEFBE | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1M, F | CYCLE 1M, F | ||
TEST14: INITIAL CURRNT | TEST14: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 99 | CYCLE 99 | ||
DRIFT0: INITIAL INITAE, INITBE | DRIFT0: INITIAL INITAE, INITBE | ||
CYCLIC INITAE, INITBE, DRIFT, CURRNT | CYCLIC INITAE, INITBE, DRIFT, CURRNT | ||
CYCLE 1 | CYCLE 1 | ||
DRIFT1: INITIAL INITAE, INITBE | DRIFT1: INITIAL INITAE, INITBE | ||
CYCLIC INITAE, INITBE, DRIFT, CURRNT | CYCLIC INITAE, INITBE, DRIFT, CURRNT | ||
CYCLE 1M,F | CYCLE 1M,F | ||
LONG01: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | LONG01: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
LONG02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | LONG02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLE 5M | CYCLE 5M | ||
MINI02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | MINI02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,INITBE | CYCLIC CURRNT,INITBE | ||
CYCLE 20M | CYCLE 20M | ||
HEIGH1: INITIAL HEIMAP,CURRNT | HEIGH1: INITIAL HEIMAP,CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
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CYCLIC DRIFT,CURRNT | CYCLIC DRIFT,CURRNT | ||
CYCLE 4 | CYCLE 4 | ||
MASK03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | MASK03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
MASK04: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | MASK04: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
MASK05: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | MASK05: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
MASK06: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | MASK06: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC INITBE,PDEFBE,SUBDEFBE,CURRNT,DRIFT | CYCLIC INITBE,PDEFBE,SUBDEFBE,CURRNT,DRIFT | ||
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AUTO00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | AUTO00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | ||
DIRE02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | DIRE02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
DIRE03: INITIAL CURRNT,INITBE | DIRE03: INITIAL CURRNT,INITBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE04: INITIAL CURRNT,INITBE,PDEFBE | DIRE04: INITIAL CURRNT,INITBE,PDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | DIRE05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE06: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | DIRE06: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | DIRE07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DRFT01: INITIAL CURRNT | DRFT01: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
SBG01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | SBG01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
SBG02: INITIAL HEIMAP | SBG02: INITIAL HEIMAP | ||
SBG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | SBG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG04: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | SBG04: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG05: INITIAL CURRNT | SBG05: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG06: INITIAL HEIMAP | SBG06: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG07: INITIAL CURRNT | SBG07: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
TOK01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | TOK01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 20M | CYCLE 20M | ||
G5MHA: INITIAL HEIMAP | G5MHA: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G5MHB: INITIAL HEIMAP | G5MHB: INITIAL HEIMAP | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G5MA: INITIAL CURRNT | G5MA: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G5MB: INITIAL CURRNT | G5MB: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G34HA: INITIAL HEIMAP | G34HA: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G34HB: INITIAL HEIMAP | G34HB: INITIAL HEIMAP | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G34A: INITIAL CURRNT | G34A: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G34B: INITIAL CURRNT | G34B: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G1HA: INITIAL HEIMAP | G1HA: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
G1HB: INITIAL HEIMAP | G1HB: INITIAL HEIMAP | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
G1A: INITIAL CURRNT | G1A: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
G1B: INITIAL CURRNT | G1B: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
HEICU: INITIAL HEIMAP,CURRNT | HEICU: INITIAL HEIMAP,CURRNT | ||
HCD: INITIAL HEIMAP | HCD: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 30M | CYCLE 30M | ||
CD: INITIAL CURRNT | CD: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 30M | CYCLE 30M | ||
FT01: INITIAL CURRNT | FT01: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M,F | CYCLE 5M,F | ||
LONG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | LONG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLE 5M,F | CYCLE 5M,F | ||
HEI: INITIAL HEIMAP | HEI: INITIAL HEIMAP | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 10M | CYCLE 10M | ||
DRF5M: INITIAL CURRNT,HEIMAP | DRF5M: INITIAL CURRNT,HEIMAP | ||
CYCLIC CURRNT,DRIFT | |||
CYCLE 5M,F | |||
DTU5M: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | DTU5M: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M,F | CYCLE 5M,F | ||
CUR: INITIAL CURRNT | CUR: INITIAL CURRNT | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 30M | CYCLE 30M | ||
</pre> | |||