Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation/Pathlist: Difference between revisions
Created page with ";;*** Mask Exposure Peformance Test *** MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE CYCLIC CURRNT,DRIFT CYCLE 5M MASK01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE CYCLIC CURRNT,DRIFT CYCLE 5M ;;*** Direct Exposure Peformance Test *** DIRE00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE CYCLIC CURRNT CYCLE 5M DIRE01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE CYCLIC CURR..." |
|||
| (9 intermediate revisions by the same user not shown) | |||
| Line 1: | Line 1: | ||
=Path list= | |||
This is the full path list as available on the JEOL 9500 system. Please contact the EBL staff if you need a custom path defined on the tool. <div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Users are NOT allowed to change the path definition file on the system.'''</div> | |||
INITIAL signifies subprograms carried out prior to pattern writing. CYCLIC determines subprograms carried out at the set interval during pattern writing. The first cycle is carried out right after INITIAL and hence before pattern writing. CYCLE defines the time between cyclic calibration, unit is minutes. The is two different behaviours toggled with the field '''F''' switch. Without the '''F''' switch cyclic calibration is only performed after pattern writing of the current chip is completed. If the pattern is a full wafer, i.e. defined as a (1,1) array in the JDF, no cyclic calibration will be done during pattern writing. With the '''F''' switch cyclic calibration will start at the end of the current writing field after the designated interval has passed. | |||
<pre> | |||
;;*** Mask Exposure Peformance Test *** | ;;*** Mask Exposure Peformance Test *** | ||
MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | ||
| Line 32: | Line 40: | ||
TEST07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
TEST08: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST08: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
TEST09: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | TEST09: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
TEST10: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | TEST10: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
TEST11: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST11: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M, F | CYCLE 5M, F | ||
TEST12: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST12: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M, F | CYCLE 5M, F | ||
TEST13: INITIAL INITAE,INITBE,CURRNT,PDEFBE | TEST13: INITIAL INITAE,INITBE,CURRNT,PDEFBE | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1M, F | CYCLE 1M, F | ||
TEST14: INITIAL CURRNT | TEST14: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 99 | CYCLE 99 | ||
DRIFT0: INITIAL INITAE, INITBE | DRIFT0: INITIAL INITAE, INITBE | ||
CYCLIC INITAE, INITBE, DRIFT, CURRNT | CYCLIC INITAE, INITBE, DRIFT, CURRNT | ||
CYCLE 1 | CYCLE 1 | ||
DRIFT1: INITIAL INITAE, INITBE | DRIFT1: INITIAL INITAE, INITBE | ||
CYCLIC INITAE, INITBE, DRIFT, CURRNT | CYCLIC INITAE, INITBE, DRIFT, CURRNT | ||
CYCLE 1M,F | CYCLE 1M,F | ||
LONG01: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | LONG01: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
LONG02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | LONG02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLE 5M | CYCLE 5M | ||
MINI02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | MINI02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,INITBE | CYCLIC CURRNT,INITBE | ||
CYCLE 20M | CYCLE 20M | ||
HEIGH1: INITIAL HEIMAP,CURRNT | HEIGH1: INITIAL HEIMAP,CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
| Line 72: | Line 92: | ||
CYCLIC DRIFT,CURRNT | CYCLIC DRIFT,CURRNT | ||
CYCLE 4 | CYCLE 4 | ||
MASK03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | MASK03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
MASK04: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | MASK04: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
MASK05: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | MASK05: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
MASK06: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | MASK06: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC INITBE,PDEFBE,SUBDEFBE,CURRNT,DRIFT | CYCLIC INITBE,PDEFBE,SUBDEFBE,CURRNT,DRIFT | ||
| Line 87: | Line 111: | ||
AUTO00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | AUTO00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | ||
DIRE02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | DIRE02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
DIRE03: INITIAL CURRNT,INITBE | DIRE03: INITIAL CURRNT,INITBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE04: INITIAL CURRNT,INITBE,PDEFBE | DIRE04: INITIAL CURRNT,INITBE,PDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | DIRE05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE06: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | DIRE06: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | DIRE07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DRFT01: INITIAL CURRNT | DRFT01: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
SBG01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | SBG01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
SBG02: INITIAL HEIMAP | SBG02: INITIAL HEIMAP | ||
SBG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | SBG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG04: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | SBG04: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG05: INITIAL CURRNT | SBG05: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG06: INITIAL HEIMAP | SBG06: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG07: INITIAL CURRNT | SBG07: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
TOK01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | TOK01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 20M | CYCLE 20M | ||
G5MHA: INITIAL HEIMAP | G5MHA: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G5MHB: INITIAL HEIMAP | G5MHB: INITIAL HEIMAP | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G5MA: INITIAL CURRNT | G5MA: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G5MB: INITIAL CURRNT | G5MB: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G34HA: INITIAL HEIMAP | G34HA: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G34HB: INITIAL HEIMAP | G34HB: INITIAL HEIMAP | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G34A: INITIAL CURRNT | G34A: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G34B: INITIAL CURRNT | G34B: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G1HA: INITIAL HEIMAP | G1HA: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
G1HB: INITIAL HEIMAP | G1HB: INITIAL HEIMAP | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
G1A: INITIAL CURRNT | G1A: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
G1B: INITIAL CURRNT | G1B: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
HEICU: INITIAL HEIMAP,CURRNT | HEICU: INITIAL HEIMAP,CURRNT | ||
HCD: INITIAL HEIMAP | HCD: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 30M | CYCLE 30M | ||
CD: INITIAL CURRNT | CD: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 30M | CYCLE 30M | ||
FT01: INITIAL CURRNT | FT01: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M,F | CYCLE 5M,F | ||
LONG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | LONG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLE 5M,F | CYCLE 5M,F | ||
HEI: INITIAL HEIMAP | HEI: INITIAL HEIMAP | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 10M | CYCLE 10M | ||
DRF5M: INITIAL CURRNT,HEIMAP | DRF5M: INITIAL CURRNT,HEIMAP | ||
CYCLIC CURRNT,DRIFT | |||
CYCLE 5M,F | |||
DTU5M: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | DTU5M: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M,F | CYCLE 5M,F | ||
CUR: INITIAL CURRNT | CUR: INITIAL CURRNT | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 30M | CYCLE 30M | ||
</pre> | |||
Latest revision as of 16:48, 16 April 2023
Path list
This is the full path list as available on the JEOL 9500 system. Please contact the EBL staff if you need a custom path defined on the tool.
Users are NOT allowed to change the path definition file on the system.
INITIAL signifies subprograms carried out prior to pattern writing. CYCLIC determines subprograms carried out at the set interval during pattern writing. The first cycle is carried out right after INITIAL and hence before pattern writing. CYCLE defines the time between cyclic calibration, unit is minutes. The is two different behaviours toggled with the field F switch. Without the F switch cyclic calibration is only performed after pattern writing of the current chip is completed. If the pattern is a full wafer, i.e. defined as a (1,1) array in the JDF, no cyclic calibration will be done during pattern writing. With the F switch cyclic calibration will start at the end of the current writing field after the designated interval has passed.
;;*** Mask Exposure Peformance Test ***
MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
MASK01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
;;*** Direct Exposure Peformance Test ***
DIRE00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT
CYCLE 5M
DIRE01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT
CYCLE 5M
;;*** Minimum Line Exposure Peformance Test ***
MINI01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
;;*** Test Exposure ***
TEST00: INITIAL HEIMAP
TEST01: INITIAL CURRNT
TEST02: INITIAL HEIMAP,CURRNT
TEST03: INITIAL CURRNT,INITBE
TEST04: INITIAL HEIMAP,CURRNT,INITBE
TEST05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
TEST06: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
TEST07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
TEST08: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
TEST09: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 1
TEST10: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 1
TEST11: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M, F
TEST12: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M, F
TEST13: INITIAL INITAE,INITBE,CURRNT,PDEFBE
CYCLIC DRIFT
CYCLE 1M, F
TEST14: INITIAL CURRNT
CYCLIC DRIFT
CYCLE 99
DRIFT0: INITIAL INITAE, INITBE
CYCLIC INITAE, INITBE, DRIFT, CURRNT
CYCLE 1
DRIFT1: INITIAL INITAE, INITBE
CYCLIC INITAE, INITBE, DRIFT, CURRNT
CYCLE 1M,F
LONG01: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
LONG02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE
CYCLE 5M
MINI02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,INITBE
CYCLE 20M
HEIGH1: INITIAL HEIMAP,CURRNT
CYCLIC CURRNT,DRIFT
CYCLE 10M
MASK02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC DRIFT,CURRNT
CYCLE 4
MASK03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
MASK04: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
MASK05: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
MASK06: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC INITBE,PDEFBE,SUBDEFBE,CURRNT,DRIFT
CYCLE 5M
AUTO00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
DIRE02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
DIRE03: INITIAL CURRNT,INITBE
CYCLIC CURRNT,DRIFT
CYCLE 20M
DIRE04: INITIAL CURRNT,INITBE,PDEFBE
CYCLIC CURRNT
CYCLE 20M
DIRE05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT
CYCLE 20M
DIRE06: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
CYCLIC CURRNT
CYCLE 20M
DIRE07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT
CYCLE 20M
DRFT01: INITIAL CURRNT
CYCLIC DRIFT
CYCLE 1
SBG01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
SBG02: INITIAL HEIMAP
SBG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
SBG04: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
SBG05: INITIAL CURRNT
CYCLIC CURRNT,DRIFT
CYCLE 5M
SBG06: INITIAL HEIMAP
CYCLIC CURRNT,DRIFT
CYCLE 5M
SBG07: INITIAL CURRNT
CYCLIC CURRNT,DRIFT
CYCLE 34
TOK01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 20M
G5MHA: INITIAL HEIMAP
CYCLIC CURRNT,DRIFT
CYCLE 5M
G5MHB: INITIAL HEIMAP
CYCLIC DRIFT
CYCLE 5M
G5MA: INITIAL CURRNT
CYCLIC CURRNT,DRIFT
CYCLE 5M
G5MB: INITIAL CURRNT
CYCLIC DRIFT
CYCLE 5M
G34HA: INITIAL HEIMAP
CYCLIC CURRNT,DRIFT
CYCLE 34
G34HB: INITIAL HEIMAP
CYCLIC DRIFT
CYCLE 34
G34A: INITIAL CURRNT
CYCLIC CURRNT,DRIFT
CYCLE 34
G34B: INITIAL CURRNT
CYCLIC DRIFT
CYCLE 34
G1HA: INITIAL HEIMAP
CYCLIC CURRNT,DRIFT
CYCLE 1
G1HB: INITIAL HEIMAP
CYCLIC DRIFT
CYCLE 1
G1A: INITIAL CURRNT
CYCLIC CURRNT,DRIFT
CYCLE 1
G1B: INITIAL CURRNT
CYCLIC DRIFT
CYCLE 1
HEICU: INITIAL HEIMAP,CURRNT
HCD: INITIAL HEIMAP
CYCLIC CURRNT,DRIFT
CYCLE 30M
CD: INITIAL CURRNT
CYCLIC DRIFT
CYCLE 30M
FT01: INITIAL CURRNT
CYCLIC CURRNT,DRIFT
CYCLE 5M,F
LONG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE
CYCLE 5M,F
HEI: INITIAL HEIMAP
CYCLIC CURRNT
CYCLE 10M
DRF5M: INITIAL CURRNT,HEIMAP
CYCLIC CURRNT,DRIFT
CYCLE 5M,F
DTU5M: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M,F
CUR: INITIAL CURRNT
CYCLIC CURRNT
CYCLE 30M