Specific Process Knowledge/Etch/Titanium Oxide/ICP metal: Difference between revisions
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===Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin | ===Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin, DTU Nanolab=== | ||
Recipe used: Ti etch | Recipe used: Ti etch <br> | ||
[[image:TiO2_etch_Evgeniy2.jpg|400px]] | [[image:TiO2_etch_Evgeniy2.jpg|400px]] | ||
Latest revision as of 10:44, 24 March 2023
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Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin, DTU Nanolab
Recipe used: Ti etch
