Specific Process Knowledge/Etch/Titanium Oxide/ICP metal: Difference between revisions

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===Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin, DTU Nanolab===


Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @danchip
Recipe used: Ti etch <br>
 
[[image:Under_construction.png|400px]]
Recipe used: Ti etch
[[image:TiO2_etch_Evgeniy2.jpg|400px]]
[[image:TiO2_etch_Evgeniy2.jpg|400px]]

Latest revision as of 10:44, 24 March 2023

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Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin, DTU Nanolab

Recipe used: Ti etch

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