Template:Peg2TableCColors: Difference between revisions
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! style="background:lime; color:black;" colspan="6" | <span title="The Pressure tab. Either (%) - fixed APC or (mTorr) - fixed pressure" >Pressure</span> | ! style="background:lime; color:black;" colspan="6" | <span title="The Pressure tab. Either (%) - fixed APC or (mTorr) - fixed pressure" >Pressure</span> | ||
! style="background:hotpink; color:black;" colspan="12" | <span title="The Gases tab" >Gases</span> | ! style="background:hotpink; color:black;" colspan="12" | <span title="The Gases tab" >Gases</span> | ||
! style="background:midnightblue; color:white;" colspan="6" | <span title="The Generators tab" >Generators</span> | |||
! style="background:white; color:midnightblue;" colspan="8" | <span title="The Matching tab" >Matching</span> | ! style="background:white; color:midnightblue;" colspan="8" | <span title="The Matching tab" >Matching</span> | ||
! style="background:darkorange; color:white;" rowspan="3" width="30" | <span title="The temperature of the platen chiller" >Tem- pera- ture </span> | ! style="background:darkorange; color:white;" rowspan="3" width="30" | <span title="The temperature of the platen chiller" >Tem- pera- ture </span> | ||
Latest revision as of 07:47, 13 February 2023
| Recipe | General | Pressure | Gases | Generators | Matching | Tem- pera- ture | BGC EM EPD | Results | ||||||||||||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dp | Et | SF6-1 | SF6-2 | O2 | Ar | N2 | He | Coil | Platen | Coil | Platen | |||||||||||||||||||||||||||||||
| Platen | St | S/E | Dp | Et | R | D | B | M | D | B | M | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Runs | Keywords | |||||||||