Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE blazed gratings: Difference between revisions
No edit summary |
No edit summary |
||
| Line 1: | Line 1: | ||
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/IBE_blazed_gratings click here]''' | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/IBE_blazed_gratings click here]''' | ||
<br> {{CC-bghe1}} | |||
*60nm Barc | *60nm Barc | ||
*360nm KRF resist | *360nm KRF resist | ||
''by | ''by bghe@nanolab'' experiments made in June/July 2012 | ||
<gallery caption="Some examples of blazed gratings in fused silica etched with Cr and DUV resist as masking layer " widths="300px" heights="250px"> | <gallery caption="Some examples of blazed gratings in fused silica etched with Cr and DUV resist as masking layer " widths="300px" heights="250px"> | ||