Template:Peg2cont1: Difference between revisions
Created page with "{| class="mw-collapsible mw-collapsed wikitable" ! scope="col" colspan="8"| {{{stepname}}} |- ! scope="col" | ! scope="col" | General ! scope="row" | Time ! scope="row" | Pressure ! scope="row" | Gas ! scope="row" | Pl. Generator ! scope="row" | Matching ! scope="row" | Miscellaneous |- ! scope="row" | Setting | {{{generalbox }}} | {{{timebox}}} | {{{presbox}}} | {{{gasbox}}} | {{{RFbox}}} | {{{matchbox}}} | {{{miscbox}}} |}" |
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! scope="col" | General | ! scope="col" | <span title="The General tab: Information on gas stabilisation, platen position and ramping" >General</span> | ||
! scope=" | ! scope="col" | <span title="Duration of the step in seconds or number of cycles" >Time</span> | ||
! scope=" | ! scope="col" | <span title="The pressure: Fixed pressure (mTorr) or fixed APC (%) " >Pressure</span> | ||
! scope=" | ! scope="col" | <span title="The flow (sccm) of which gas" >Gas</span> | ||
! scope=" | ! scope="col" | <span title="Parameters of the RF platen generator: Power (W) and F=forward or L=Load mode> " >Power </span> | ||
! scope=" | ! scope="col" | <span title="The setpoints for the RF Matching parameters: Load and Tune L/T in (%) " >Matching </span> | ||
! scope=" | ! scope="col" | <span title="Backside Gas Cooling BGC enabled? ElectroMagnetic coil (EM) enabled? EndPoint Detection enabled?" >Miscellaneous</span> | ||
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! scope="row" | Setting | ! scope="row" | Setting | ||
Latest revision as of 14:50, 15 December 2022
| {{{stepname}}} | |||||||
|---|---|---|---|---|---|---|---|
| General | Time | Pressure | Gas | " >Power | Matching | Miscellaneous | |
| Setting | {{{generalbox }}} | {{{timebox}}} | {{{presbox}}} | {{{gasbox}}} | {{{RFbox}}} | {{{matchbox}}} | {{{miscbox}}} |