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Specific Process Knowledge/Lithography/ARN8200: Difference between revisions

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Area/curved element dose: Fully insoluble dose is around 150-180 µC/cm2.
Area/curved element dose: Fully insoluble dose is around 150-180 µC/cm2.


Line dose: Fully insoluble dose is around 1700 µC/cm.
Line dose: Fully insoluble dose is around 1700 pC/cm.


Dot dose: Fully insoluble dose is around 0.1 µC, this gives a circular diameter of 60 nm. Diameter can be varied by increasing dose, at 0.4 µC diameter is about 100 nm and at 1.2 µC it is about 170 nm.
Dot dose: Fully insoluble dose is around 0.1 pC, this gives a circular diameter of 60 nm. Diameter can be varied by increasing dose, at 0.4 pC diameter is about 100 nm and at 1.2 pC it is about 170 nm.
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