Template:Peg1RecipeTableVerCColors: Difference between revisions
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! style="background:darkgray; color:black;" rowspan="2" | <span title="Duration of the deposition cycle (s)" >Dp</span> | ! style="background:darkgray; color:black;" rowspan="2" | <span title="Duration of the deposition cycle (s)" >Dp</span> | ||
! style="background:gray; color:white;" rowspan="2" | <span title="Duration of the etch cycle (s)" >Et</span> | ! style="background:gray; color:white;" rowspan="2" | <span title="Duration of the etch cycle (s)" >Et</span> | ||
! style="background:dimgray; color:white;" rowspan="2" | <span title="The number of cycles" >Cyc</span> | ! style="background:dimgray; color:white;" rowspan="2" | <span title="The number of cycles. This is only relevant for recipes with ramped parameters." >Cyc</span> | ||
! style="background:lime; color:black;" colspan="3" | <span title="Deposition cycle">Dp</span> | ! style="background:lime; color:black;" colspan="3" | <span title="Deposition cycle">Dp</span> | ||
! style="background:lime; color:white;" colspan="3" | <span title="Etch cycle">Et</span> | ! style="background:lime; color:white;" colspan="3" | <span title="Etch cycle">Et</span> | ||
Latest revision as of 11:28, 17 December 2020
| Recipe | General | Pressure | Gases | Generators | Matching | Tem- pera- ture | Results | |||||||||||||||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| C4F8 | SF6 | Ar | Coil | Platen | Coil | Platen | ||||||||||||||||||||||||||||||||||||||
| Platen | Stb | S/E | Dp | Et | Cyc | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Runs | Keywords | |||||||||||||||||||||
| U/D | H/L | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | L | T | L | T | L | T | L | T | ||||||||||||||