| Display title | Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ZnO deposition using ALD/Obsolete |
| Default sort key | Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ZnO deposition using ALD/Obsolete |
| Page length (in bytes) | 3,265 |
| Namespace ID | 0 |
| Page ID | 6160 |
| Page content language | en - English |
| Page content model | wikitext |
| Indexing by robots | Allowed |
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| Counted as a content page | Yes |
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| Page creator | Eves (talk | contribs) |
| Date of page creation | 12:10, 4 March 2022 |
| Latest editor | Pevo (talk | contribs) |
| Date of latest edit | 13:09, 19 June 2023 |
| Total number of edits | 4 |
| Total number of distinct authors | 2 |
| Recent number of edits (within past 90 days) | 0 |
| Recent number of distinct authors | 0 |
